Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor

Sensors and Actuators, A: Physical

Volumn 159, Issue 1, 2010, Pages 58-63

  Loui, A ^a   Sirbuly, D J ^a   Elhadj, S ^a   McCall, S K ^a   Hart, B R ^a   Ratto, T V ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Cantilever sensor; Gas detection; Resonant damping; Thermal conductivity

Indexed keywords

ANALYTES; CANTILEVER SENSORS; DATA SETS; DETECTION MODE; DUAL-MODALITY; EXPERIMENTAL STUDIES; GAS DETECTION; HEAT DISSIPATION; HEAT DISSIPATION MECHANISM; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; PHYSICAL MECHANISM; PURE GAS; RESONANT DAMPING; RESONANT RESPONSE; SENSOR RESPONSE; THERMAL RESPONSE;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DAMPING; GAS DETECTORS; GASES; NANOCANTILEVERS; THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY OF GASES; THERMOANALYSIS;

BINARY MIXTURES;

EID: 77950340629     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.004     Document Type: Article

References (37)

1. Porter T.L., Eastman M.P., Pace D.L., and Bradley M. Sensor based on piezoresistive microcantilever technology. Sens. Actuator A 88 (2001) 47-51
2. Abedinov N., Popov C., Yordanov Z., Gotszalk T., Grabiec P., Kulisch W., Rangelow I.W., Filenko D., and Shirshov Y. Chemical recognition based on micromachined silicon cantilever array. J. Vac. Sci. Technol. B 21 (2003) 2931-2936
3. Kooser A., Gunter R.L., Delinger W.D., Porter T.L., and Eastman M.P. Gas sensing using embedded piezoresistive microcantilever sensors. Sens. Actuators B 99 (2004) 474-479
4. Pinnaduwage L.A., Hedden D.L., Gehl A., Boiadjiev V.I., Hawk J.E., Farahi R.H., Thundat T., Houser E.J., Stepnowski S., McGill R.A., Deel L., and Lareau R.T. A sensitive, handheld vapor sensor based on microcantilevers. Rev. Sci. Instrum. 75 (2004) 4554-4557
5. 2 microcantilever piezoresistive sensor. Anal. Chim. Acta 580 (2006) 123-127
6. 2 cantilever sensor for ultra-sensitive detection of gaseous chemicals. J. Micromech. Microeng. 16 (2006) 2539-2546
7. Zuo G.M., Li X.X., Zhang Z.X., Yang T.T., Wang Y.L., Cheng Z.X., and Feng S.L. Dual-SAM functionalization on integrated cantilevers for specific trace-explosive sensing and non-specific adsorption suppression. Nanotechnology 18 (2007) 255501
8. Porter T.L., Vail T.L., Eastman M.P., Stewart R., Reed J., Venedam R., and Delinger W. A solid-state sensor platform for the detection of hydrogen cyanide gas. Sens. Actuator B 123 (2007) 313-317
9. Loui A., Ratto T.V., Wilson T.S., McCall S.K., Mukerjee E.V., and Hart B.R. Chemical vapor discrimination using a compact and low-power array of piezoresistive microcantilevers. Analyst 133 (2008) 608-615
10. Okuyama S., Mitobe Y., Okuyama K., and Matsushita K. Hydrogen gas sensing using a Pd-coated cantilever. Jpn. J. Appl. Phys. 39 (2000) 3584-3590
11. Baselt D.R., Fruhberger B., Klaassen E., Cemalovic S., Britton C.L., Patel S.V., Mlsna T.E., McCorkle D., and Warmack B. Design and performance of a microcantilever-based hydrogen sensor. Sens. Actuators B 88 (2003) 120-131
12. Loui A., Goericke F.T., Ratto T.V., Lee J., Hart B.R., and King W.P. The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing. Sens. Actuator A 147 (2008) 516-521
13. http://www.figarosensor.com
14. Gall M. The Si planar pellistor-a low-power pellistor sensor in Si thin-film technology. Sens. Actuators B 4 (1991) 533-538
15. Krebs P., and Grisel A. A low-power integrated catalytic gas sensor. Sens. Actuators B 13 (1993) 155-158
16. Dücso{combining double acute accent} C., Ádám M., Fürjes P., Hirschfelder M., Kulinyi S., and Bársony I. Explosion-proof monitoring of hydrocarbons by mechanically stabilised, integrable calorimetric microsensors. Sens. Actuator B 95 (2003) 189-194
17. Kulinyi S., Brandszájsz D., Amine H., Ádám M., Fürjes P., Bársony I., and Dücso{combining double acute accent} C. Olfactory detection of methane, propane, butane and hexane using conventional transmitter norms. Sens. Actuators B 111 (2005) 286-292
18. Simon I., and Arndt M. Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications. Sens. Actuators A 97-98 (2001) 104-108
19. Tardy P., Coulon J.R., Lucat C., and Menil F. Dynamic thermal conductivity sensor for gas detection. Sens. Actuator B 98 (2004) 63-68
20. http://www.e2v.com
21. Mitrovics J., Ulmer H., Weimar U., and Göpel W. Modular sensor systems for gas sensing and odor monitoring: the MOSES concept. Accounts Chem. Res. 31 (1998) 307-315
22. Kurzawski P., Hagleitner C., and Hierlemann A. Detection and discrimination capabilities of a multitransducer single-chip gas sensor system. Anal. Chem. 78 (2006) 6910-6920
23. Jin C.G., Kurzawski P., Hierlemann A., and Zellers E.T. Evaluation of multitransducer arrays for the determination of organic vapor mixtures. Anal. Chem. 80 (2008) 227-236
24. Loui A., Elhadj S., Sirbuly D.J., McCall S.K., Hart B.R., and Ratto T.V. An analytic model of thermal drift in piezoresistive microcantilever sensors. J. Appl. Phys. 107 (2010) 054508
25. In: Lide D.R. (Ed). CRC Handbook of Chemistry and Physics (2005), CRC Press, Boca Raton, FL
26. Yu X., Thaysen J., Hansen O., and Boisen A. Optimization of sensitivity and noise in piezoresistive cantilevers. J. Appl. Phys. 92 (2002) 6296-6301
27. Geisberger A.A., Sarkar N., Ellis M., and Skidmore G.D. Electrothermal properties and modeling of polysilicon microthermal actuators. J. Microelectromech. Syst. 12 (2003) 513-523
28. Chapman P.W., Tufte O.N., Zook J.D., and Long D. Electrical properties of heavily doped silicon. J. Appl. Phys. 34 (1963) 3291-3295
29. Corbin E.A., Park K., and King W.P. Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers. Appl. Phys. Lett. 94 (2009) 243503
30. Jolliffe I.T. Principal Component Analysis (1986), Springer-Verlag
31. Xu Y., Lin J.T., Alphenaar B.W., and Keynton R.S. Viscous damping of microresonators for gas composition analysis. Appl. Phys. Lett. 88 (2006) 143513
32. Blom F.R., Bouwstra S., Elwenspoek M., and Fluitman J.H.J. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. J. Vac. Sci. Technol. B 10 (1992) 19-26
33. Kokubun K., Hirata M., Murakami H., Toda Y., and Ono M. A bending and stretching mode crystal-oscillator as a friction vacuum gauge. Vacuum 34 (1984) 731-735
34. Gysin U., Rast S., Ruff P., Meyer E., Lee D.W., Vettiger P., and Gerber C. Temperature dependence of the force sensitivity of silicon cantilevers. Phys. Rev. B 69 (2004) 045403
35. Lee J., Beechem T., Wright T.L., Nelson B.A., Graham S., and King W.P. Electrical, thermal, and mechanical characterization of silicon microcantilever heaters. J. Microelectromech. Syst. 15 (2006) 1644-1655
36. Graf M., Frey U., Taschini S., and Hierlemann A. Micro hot plate-based sensor array system for the detection of environmentally relevant gases. Anal. Chem. 78 (2006) 6801-6808
37. http://www.veecoprobes.com