Numerical analysis of dynamic effects of a nonlinear vibro-impact process for enhancing the reliability of contact-type MEMS devices

Sensors

Volumn 9, Issue 12, 2009, Pages 10201-10216

  Ostasevicius, Vytautas ^a   Gaidys, Rimvydas ^a   Dauksevicius, Rolanas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Contact; Finite element analysis; Mems; Nodal points; Vibration modes; Vibro impact

Indexed keywords

FLEXURAL VIBRATION MODES; MODEL AND SIMULATION; NODAL POINTS; NONLINEAR VIBRO-IMPACT; PERFORMANCE AND RELIABILITIES; VIBRATION MODES; VIBRO-IMPACT; VISCOELASTIC SUPPORTS;

CONTACTS (FLUID MECHANICS); FINITE ELEMENT METHOD; MEMS;

COMPUTER SIMULATION;

EID: 77950282079     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s91210201     Document Type: Article

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