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Volumn 31, Issue 4, 2010, Pages 284-286

Suppression of electron mobility degradation in (100)-oriented double-gate ultrathin body nMOSFETs

Author keywords

Double gate (DG); Electron mobility; MOSFET; SOI

Indexed keywords

DOUBLE GATE; DOUBLE GATE (DG); MOBILITY DEGRADATION; MOS-FET; NMOSFETS; QUANTUM CONFINEMENT EFFECTS; SINGLE GATES; SOI THICKNESS; SUPPRESSION MECHANISM; THIN SOI; ULTRATHIN BODY; ULTRATHIN-BODY MOSFETS;

EID: 77950069754     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2010.2041179     Document Type: Article
Times cited : (8)

References (15)
  • 1
    • 27744592434 scopus 로고    scopus 로고
    • Experimental study on superior hole mobility in (110)-oriented UTB SOI pMOSFETs
    • Nov
    • G. Tsutsui, M. Saitoh, and T. Hiramoto, "Experimental study on superior hole mobility in (110)-oriented UTB SOI pMOSFETs," IEEE Electron Device Lett., vol.26, no.11, pp. 836-838, Nov. 2005.
    • (2005) IEEE Electron Device Lett. , vol.26 , Issue.11 , pp. 836-838
    • Tsutsui, G.1    Saitoh, M.2    Hiramoto, T.3
  • 2
    • 40749154774 scopus 로고    scopus 로고
    • Mobility and threshold-voltage comparison between (110)-and (100)-oriented ultrathin-body silicon MOSFETs
    • Oct
    • G. Tsutsui and T. Hiramoto, "Mobility and threshold-voltage comparison between (110)-and (100)-oriented ultrathin-body silicon MOSFETs," IEEE Trans. Electron Devices, vol.53, no.10, pp. 2582-2588, Oct. 2006.
    • (2006) IEEE Trans. Electron Devices. , vol.53 , Issue.10 , pp. 2582-2588
    • Tsutsui, G.1    Hiramoto, T.2
  • 3
    • 50249181142 scopus 로고    scopus 로고
    • More-than-universal mobility in double-gate SOI p-FETs with sub-10-nm body thickness\Role of light-hole band and compatibility with uniaxial stress engineering
    • S. Kobayashi, M. Saitoh, and K. Uchida, "More-than-universal mobility in double-gate SOI p-FETs with sub-10-nm body thickness\Role of light-hole band and compatibility with uniaxial stress engineering," in IEDM Tech. Dig., 2007, pp. 707-710.
    • (2007) IEDM Tech. Dig. , pp. 707-710
    • Kobayashi, S.1    Saitoh, M.2    Uchida, K.3
  • 4
    • 0842331295 scopus 로고    scopus 로고
    • Experimental study on carrier transport mechanisms in double-and single-gate ultrathin-body MOSFETs\Coulomb scattering, volume inversion, and >5Tsoi-induced scattering
    • K. Uchida, J. Koga, and S. Takagi, "Experimental study on carrier transport mechanisms in double-and single-gate ultrathin-body MOSFETs\Coulomb scattering, volume inversion, and >5Tsoi-induced scattering" IEDM Tech. Dig., 2003, pp. 805-808
    • (2003) IEDM Tech. Dig. , pp. 805-808
    • Uchida, K.1    Koga, J.2    Takagi, S.3
  • 5
    • 0037870335 scopus 로고    scopus 로고
    • An experimental study of mobility enhancement in ultrathin SOI transistors operated in double-gate mode
    • Mar
    • D. Esseni, M. Mastrapasqua, G. K. Celler, C. Fiegna, L. Selmi, and E. Sangiorgi, "An experimental study of mobility enhancement in ultrathin SOI transistors operated in double-gate mode," IEEE Trans. Electron Devices, vol.50, no.3, pp. 802-808, Mar. 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , pp. 802-808
    • Esseni, D.1    Mastrapasqua, M.2    Celler, G.K.3    Fiegna, C.4    Selmi, L.5    Sangiorgi, E.6
  • 6
    • 0347968246 scopus 로고    scopus 로고
    • Physically based modeling of low field electron mobility in ultrathin single-and double-gate SOI n-MOSFETs
    • Dec
    • D. Esseni, A. Abramo, L. Selmi, and E. Sangiorgi, "Physically based modeling of low field electron mobility in ultrathin single-and double-gate SOI n-MOSFETs," IEEE Trans. Electron Devices, vol.50, no.12, pp. 2445-2455, Dec. 2003.
    • (2003) IEEE Trans. Electron Devices. , vol.50 , Issue.12 , pp. 2445-2455
    • Esseni, D.1    Abramo, A.2    Selmi, L.3    Sangiorgi, E.4
  • 7
    • 35648960817 scopus 로고    scopus 로고
    • Evidence for mobility enhancement in double-gate silicon-on-insulator metal-oxide-semiconductor field-effect transistors
    • Oct
    • N. Rodriguez, S. Cristoloveanu, and F. Gámiz, "Evidence for mobility enhancement in double-gate silicon-on-insulator metal-oxide- semiconductor field-effect transistors," J. Appl. Phys., vol.102, no.8, p. 083 712, Oct. 2007.
    • (2007) J. Appl. Phys. , vol.102 , Issue.8 , pp. 083712
    • Rodriguez, N.1    Cristoloveanu, S.2    Gámiz, F.3
  • 8
    • 0036927506 scopus 로고    scopus 로고
    • Experimental study on carrier transport mechanism in ultrathin-body SOI n-and p-MOSFETs with SOI thickness less than 5 nm
    • K. Uchida, H. Watanabe, A. Kinoshita, J. Koga, T. Numata, and S. Takagi, "Experimental study on carrier transport mechanism in ultrathin-body SOI n-and p-MOSFETs with SOI thickness less than 5 nm," in IEDM Tech. Dig., 2002, pp. 47-50.
    • (2002) IEDM Tech. Dig. , pp. 47-50
    • Uchida, K.1    Watanabe, H.2    Kinoshita, A.3    Koga, J.4    Numata, T.5    Takagi, S.6
  • 9
    • 34248645425 scopus 로고    scopus 로고
    • Experimental study on breakdown of mobility universality in (100)-directed (110)-oriented pMOSFETs
    • May
    • K. Shimizu, G. Tsutsui, D. Januar, T. Saraya, and T. Hiramoto, "Experimental study on breakdown of mobility universality in (100)-directed (110)-oriented pMOSFETs," IEEE Trans. Nanotechnol., vol.6, no.3, pp. 358-361, May 2007.
    • (2007) IEEE Trans. Nanotechnol. , vol.6 , Issue.3 , pp. 358-361
    • Shimizu, K.1    Tsutsui, G.2    Januar, D.3    Saraya, T.4    Hiramoto, T.5
  • 10
    • 34547838418 scopus 로고    scopus 로고
    • Experimental study on mobility universality in (100) ultrathin body nMOSFETs with SOI thickness of 5 nm
    • May
    • K. Shimizu, G. Tsutsui, and T. Hiramoto, "Experimental study on mobility universality in (100) ultrathin body nMOSFETs with SOI thickness of 5 nm," Jpn. J. Appl. Phys., vol.46, no.20-24, pp. L480-L482, May 2007.
    • (2007) Jpn. J. Appl. Phys. , vol.46 , Issue.20-24
    • Shimizu, K.1    Tsutsui, G.2    Hiramoto, T.3
  • 11
    • 0028423558 scopus 로고
    • Deep-submicrometer channel design in silicon-on-insulator (SOI) MOSFETs
    • May
    • L. T. Su, J. B. Jacobs, J. E. Chung, and D. A. Antoniadis, "Deep-submicrometer channel design in silicon-on-insulator (SOI) MOSFETs," IEEE Electron Device Lett., vol.15, no.5, pp. 183-185, May 1994.
    • (1994) IEEE Electron Device Lett. , vol.15 , Issue.5 , pp. 183-185
    • Su, L.T.1    Jacobs, J.B.2    Chung, J.E.3    Antoniadis, D.A.4
  • 12
    • 0141940117 scopus 로고    scopus 로고
    • Scaling fully depleted SOI CMOS
    • Oct
    • V. P. Trivedi and J. G. Fossum, "Scaling fully depleted SOI CMOS," IEEE Trans. Electron Devices, vol.50, no.10, pp. 2095-2103, Oct. 2003. [Online]. Available: http://www.itrs.net/
    • (2003) IEEE Trans. Electron Devices. , vol.50 , Issue.10 , pp. 2095-2103
    • Trivedi, V.P.1    Fossum, J.G.2
  • 13
    • 33847271198 scopus 로고    scopus 로고
    • Volume inversion mobility in SOI MOSFETs for different thin body orientations
    • Feb
    • V. Sverdlov, E. Ungersboeck, H. Kosina, and S. Selberherr, "Volume inversion mobility in SOI MOSFETs for different thin body orientations," Solid State Electron., vol.51, no.2, pp. 299-305, Feb. 2007.
    • (2007) Solid State Electron. , vol.51 , Issue.2 , pp. 299-305
    • Sverdlov, V.1    Ungersboeck, E.2    Kosina, H.3    Selberherr, S.4
  • 14
    • 0001156050 scopus 로고
    • Self-consistent results for n-type Si inversion layers
    • Jun
    • F. Stern, "Self-consistent results for n-type Si inversion layers," Phys. Rev. B, Condens. Matter, vol.5, no.12, pp. 4891-4899, Jun. 1972.
    • (1972) Phys. Rev. B, Condens. Matter. , vol.5 , Issue.12 , pp. 4891-4899
    • Stern, F.1
  • 15
    • 0001114294 scopus 로고    scopus 로고
    • Electronic structures and phonon-limited electron mobility of double-gate silicon-on-insulator Si inversion layers
    • M. Shoji and S. Horiguchi, "Electronic structures and phonon-limited electron mobility of double-gate silicon-on-insulator Si inversion layers," J. Appl. Phys., vol.85, no.5, pp. 2722-2731, 1999.
    • (1999) J. Appl. Phys. , vol.85 , Issue.5 , pp. 2722-2731
    • Shoji, M.1    Horiguchi, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.