Increasing sp3 hybridized carbon atoms in germanium carbide films by increasing the argon ion energy and germanium content

Journal of Physics D: Applied Physics

Volumn 43, Issue 13, 2010, Pages

  Hu, C Q ^a,b   Zheng, B ^b   Zhu, J Q ^a   Han, J C ^a   Zheng, W T ^b   Guo, L F ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ABRUPT TRANSITION; ARGON ION; CARBON ATOMS; CRITICAL VALUE; ENERGY MINIMIZATION; FILM DEPOSITION; GE CONTENT; GERMANIUM CARBIDE; ION ENERGIES; MIXTURE DISCHARGES; NEGATIVE BIAS; RADIO FREQUENCIES; RF-POWER; SI(0 0 1);

ARGON; CARBIDES; CARBON FILMS; COMPRESSIVE STRESS; TENSILE STRESS;

GERMANIUM;

EID: 77949707203     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/13/135103     Document Type: Article

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