The deposition and optical properties of Ge1-xCx thin film and infrared multilayer antireflection coatings

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 3189-3195

  Wu, Xiaowen ^a   Zhang, Weijia ^a   Yan, Lanqin ^a   Luo, Ruiying ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

Antireflection coatings; Ge1 xCx thin film; Infrared property; PECVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; DEPOSITION RATES; MICROSTRUCTURE; PARAMETER ESTIMATION;

CARBON INFRARED ANTIREFLECTION; INFRARED PROPERTY; RADIO-FREQUENCY POWE;

ANTIREFLECTION COATINGS;

EID: 39649087817     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.09.001     Document Type: Article

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