Multilayer antireflective and protective coatings comprising amorphous diamond and amorphous hydrogenated germanium carbide for ZnS optical elements

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 3117-3122

  Zhu, J Q ^a   Jiang, C Z ^a   Han, X ^a   Han, J C ^a   Meng, S H ^a   Hu, C Q ^b   Zheng, W T ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b JILIN UNIVERSITY   (China)

Author keywords

Amorphous materials; Hardness; Optical coatings; Optical properties; Plasma deposition

Indexed keywords

AMORPHOUS MATERIALS; GERMANIUM COMPOUNDS; MICROHARDNESS; MULTILAYER FILMS; OPTICAL DEVICES; PLASMA DEPOSITION;

AMORPHOUS DIAMOND; CATHODIC VACUUM ARC TECHNOLOGY; GERMANIUM CARBIDE; OPTICS THEORY;

OPTICAL COATINGS;

EID: 39749153439     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.199     Document Type: Article

References (40)

1. Tropf W.J., Harris T.J., and Thomas M.E. In: Waynant R.W., and Ediger M.N. (Eds). Electro-Optics Handbook. 2nd Edition (2000), McGraw-Hill Press, Columbus 11.30
2. Harris D.C. Infrared Window and Dome Materials (1992), SPIE Optical Engineering Press 94
3. Field J.E., Sun Q., and Gao H. In: Klocek P. (Ed). Window and Dome Technologies and Materials IV, San Diego, CA, U.S.A. Proc. SPIE vol. 2286 (1994) 301
4. Seward C.R., Pickles C.S.J., Marrah R., and Field J.E. In: Klocek P. (Ed). Window and Dome Technologies and Materials III, San Diego, CA, U.S.A., July 22-23. Proc. SPIE vol. 1760 (1992) 280
5. Davanloo F., Lee T.J., Jander D.R., Park H., You J.H., and Collins C.B. J. Appl. Phys. 71 (1992) 1446
6. Seward C.R., Coad E.J., Pickles C.S.J., and Field J.E. In: Klocek P. (Ed). Window and Dome Technologies and Materials IV, San Diego, CA, U.S.A. Proc. SPIE vol. 2286 (1994) 285
7. Monteiro O.R., Ager III J.W., Lee D.H., Lo R.Y., Walter K.C., and Nastasi M. J. Appl. Phys. 88 (2000) 2395
8. Theye M.L., Sadki A., Bounouh Y., Von Bardeleben J., Cernogora J., and Fave J.L. Diamond Relat. Mater. 5 (1996) 439
9. Shi X., Tay B.K., and Lau S.P. Int. J. Mod. Phys. B 14 (2000) 136
10. Sharda T., Rahaman M.M., Nukava Y., Soga T., Jimbo T., and Umeno M. Diamond Relat. Mater. 10 (2001) 561
11. Davanloo F., Park H., You J.H., and Collins C.B. J. Adhes. Sci. Technol. 9 (1995) 681
12. Han J.C., Zhu J.Q., Niu L., Lu J., and Chen W.S. Surf. Coat. Technol. 201 (2007) 5323
13. Martin P.M., Johnston J.W., and Bennett W.D. Properties of reactively-deposited SiC and GeC alloys. International Symposium on Optical and Optoelectronic Applied Science and Engineering (1990), U.S. Dept. of Energy
14. Hu C.Q., Zheng W.T., Zheng B., Li J.J., Jin Z.S., Bai X.M., Tian H.W., Jiang Q., Wang X.Y., Zhu J.Q., Meng S.H., He X.D., and Han J.C. Vacuum 77 (2004) 63
15. Hariharan P. Optical Interferometry (1985), Academic Press, Sydney 79
16. J.F. Tang, Q. Zheng, Applied Film Optics, Shanghai Science & Technology Press, Shanghai, 1984, p. 39-81; p. 365-388. (in Chinese).
17. J.Q. Zhu, S.H. Meng, J.C. Han, A.P. Liu, Q. Li, Chinese Patent No.200510009896.0, 15 Apr. 2005.
18. Lifshitz Y., Lempert G.D., Grossmann E., Scheibe H.J., Voellmar S., Schultrich B., Breskin A., Chechik R., Shefer E., Bacon D., Kalish R., and Hoffman A. Diamond Relat. Mater. 6 (1997) 687
19. Zhang X.W., Cheung W.Y., Ke N., and Wong S.P. J. Appl. Phys. 92 (2002) 1242
20. Canillas A., Polo M.C., Andujar J.L., Sancho J., Bosch S., Robertson J., and Milne W.I. Diamond Relat. Mater. 10 (2001) 1132
21. Tay B.K., Shi X., Cheah L.K., and Flynn D.I. Thin Solid Films 308-309 (1997) 268
22. Tropf W.J., Harris T.J., and Thomas M.E. In: Waynant R.W., and Ediger M.N. (Eds). Electro-Optics Handbook. 2nd Edition (2000), McGraw-Hill Press, Columbus 11.29
23. Gaskell P.H., Saeed A., Chieux P., and McKenzie D.R. Phys. Rev. Lett. 67 (1991) 1286
24. Gilkes K.W.R., Gaskell P.H., and Yuan J. J. Non-Cryst. Solids 164-166 (1993) 1107
25. Lee C.H., Lambrecht W.R.L., Segall B., Kelires P.C., Frauenheim T., and Stephan U. Phys. Rev., B 49 (1994) 11448
26. Robertson J. Diamond Relat. Mater. 4 (1995) 297
27. Lifshitz Y., Lempert G.D., and Grossman E. Phys. Rev. Lett. 72 (1994) 2753
28. Koponen I., Hakovirta M., and Lappalainen R. J. Appl. Phys. 78 (1995) 5837
29. Hofsäss H., Feldermann H., Merk R., Sebastian M., and Ronning C. Appl. Phys., A 66 (1998) 153
30. McKenzie D.R., Muller D., and Pailthorpe B.A. Phys. Rev. Lett. 67 (1991) 773
31. Kelires P.C. Phys. Rev., B 62 (2000) 15686
32. Veerasamy V.S., Amaratunga G.A.J., Milne W.I., Hewitt P., Fallon P.J., McKenzie D.R., and Davis C.A. Diamond Relat. Mater. 2 (1993) 782
33. Dischler B., Bubenzer A., and Koidl P. Appl. Phys. Lett. 42 (1983) 636
34. Wagner J., and Lautenschlager P. J. Appl. Phys. 59 (1986) 2044
35. Souza D.R.D., Soares L.L., Cescato L., Alves M.A.R., and Braga E.S. Microelectron. J. 31 (2000) 251
36. Bouzerar R., Amory C., Zeinert A., Benlahsen M., Racine B., and Durand-Drouhin O. J. Non-Cryst. Solids 281 (2001) 171
37. Wei Q., and Narayan J. Int. Mater. Rev. 45 (2000) 133
38. Yin Y., and McKenzie D.R. Thin Solid Films 280 (1996) 95
39. Vilcarromero J., Marques F.C., and Freire Jr. F.L. J. Appl. Phys. 84 (1998) 174
40. Telling R.H., Jibert G.H., and Field J.E. In: Tustison R.W. (Ed). Window and Dome Technologies and Materials V, Orlando, Florida, U.S.A. Proc. SPIE vol. 3060 (June 1997) 56