Micro gas sensor assembly of tin oxide nano-particles by a capillary micro-molding process

Journal of the Ceramic Society of Japan

Volumn 118, Issue 1375, 2010, Pages 202-205

  Fudouzi, Hiroshi ^a   Sakka, Yoshio ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Gas sensor; Micro molding in capillaries (MIMIC); Nano powder; PDMS mold; Soft lithography; Tin oxide

Indexed keywords

CHEMICAL SENSORS; COST EFFECTIVENESS; ETHANOL; GAS DETECTORS; GASES; HEAT RESISTANCE; MICROSENSORS; MOLDING; NANOPARTICLES; POWDERS; TIN; TIN OXIDES;

COST EFFECTIVE; ELECTRICAL RESISTANCES; MICRO MOLDING; MICRO-GAS SENSORS; MICRO-MOLDING PROCESS; NANO POWDERS; SENSOR RESISTANCE; SOFT LITHOGRAPHY;

NANOSENSORS;

EID: 77949534411     PISSN: 18820743     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj2.118.202     Document Type: Article

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