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Volumn 95, Issue 24, 2009, Pages

Fabrication of high efficiency III-V quantum nanostructures at low thermal budget on Si

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE LAYER; BACK-END INTEGRATION; DROPLET EPITAXY; GAAS SUBSTRATES; GAAS/ALGAAS; HIGH EFFICIENCY; INTERSUBBAND DETECTORS; LIGHT EMITTING DEVICES; LOW THERMAL BUDGET; MIGRATION ENHANCED EPITAXY; OPTICAL EFFICIENCY; QUANTUM DOT MATERIALS; QUANTUM NANOSTRUCTURES; SILICON SUBSTRATES; STATE OF THE ART; WHOLE PROCESS;

EID: 77949408326     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3273860     Document Type: Article
Times cited : (27)

References (32)
  • 2
    • 0027904542 scopus 로고
    • III-V on Si: heteroepitaxy versus lift-off techniques
    • DOI 10.1016/0022-0248(93)90583-I
    • J. De Boeck and G. Borghs, J. Cryst. Growth JCRGAE 0022-0248 127, 85 (1993). 10.1016/0022-0248(93)90583-I (Pubitemid 23688164)
    • (1993) Journal of Crystal Growth , vol.127 , Issue.1-4 , pp. 85-92
    • De Boeck, J.1    Borghs, G.2
  • 17
    • 0000052659 scopus 로고    scopus 로고
    • JAPIAU 0021-8979,. 10.1063/1.372227
    • S. M. Ting and E. A. Fitzgerald, J. Appl. Phys. JAPIAU 0021-8979 87, 2618 (2000). 10.1063/1.372227
    • (2000) J. Appl. Phys. , vol.87 , pp. 2618
    • Ting, S.M.1    Fitzgerald, E.A.2
  • 23
    • 0036645471 scopus 로고    scopus 로고
    • Effects of post-growth annealing on the optical properties of self-assembled GaAs/AlGaAs quantum dots
    • DOI 10.1016/S0022-0248(02)01434-3, PII S0022024802014343
    • S. Sanguinetti, K. Watanabe, T. Kuroda, F. Minami, Y. Gotoh, and N. Koguchi, J. Cryst. Growth JCRGAE 0022-0248 242, 321 (2002). 10.1016/S0022- 0248(02)01434-3 (Pubitemid 34732218)
    • (2002) Journal of Crystal Growth , vol.242 , Issue.3-4 , pp. 321-331
    • Sanguinetti, S.1    Watanabe, K.2    Kuroda, T.3    Minami, F.4    Gotoh, Y.5    Koguchi, N.6
  • 24
    • 0028533154 scopus 로고
    • SSCOA4 0038-1098,. 10.1016/0038-1098(94)90524-X
    • J. Y. Marzin and G. Bastard, Solid State Commun. SSCOA4 0038-1098 92, 437 (1994). 10.1016/0038-1098(94)90524-X
    • (1994) Solid State Commun. , vol.92 , pp. 437
    • Marzin, J.Y.1    Bastard, G.2
  • 29
    • 0002694794 scopus 로고
    • JAPIAU 0021-8979,. 10.1063/1.341981
    • D. G. Deppe and N. Holonyak, Jr., J. Appl. Phys. JAPIAU 0021-8979 64, R93 (1988). 10.1063/1.341981
    • (1988) J. Appl. Phys. , vol.64 , pp. 93
    • Deppe, D.G.1    Holonyak, Jr.N.2
  • 30
    • 26444523574 scopus 로고    scopus 로고
    • Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices
    • DOI 10.1109/TED.2005.854287
    • H. Takeuchi, A. Wung, X. Sun, R. T. Howe, and T.-J. King, IEEE Trans. Electron Devices IETDAI 0018-9383 52, 2081 (2005). 10.1109/TED.2005.854287 (Pubitemid 41417603)
    • (2005) IEEE Transactions on Electron Devices , vol.52 , Issue.9 , pp. 2081-2086
    • Takeuchi, H.1    Wung, A.2    Sun, X.3    Howe, R.T.4    King, T.-J.5
  • 31
    • 0026413224 scopus 로고
    • Atomic layer molecular beam epitaxy (ALMBE). Growth kinetics and applications
    • DOI 10.1016/0022-0248(91)90970-G
    • F. Briones and A. Ruiz, J. Cryst. Growth JCRGAE 0022-0248 111, 194 (1991). 10.1016/0022-0248(91)90970-G (Pubitemid 21665007)
    • (1991) Journal of Crystal Growth , vol.111 , Issue.1-4 , pp. 194-199
    • Briones, F.1    Ruiz, A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.