A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly

2009 IEEE International Symposium on Assembly and Manufacturing, ISAM 2009

Volumn , Issue , 2009, Pages 95-100

  Rabenorosoa, Kanty ^a   Clévy, Cédric ^a   Lutz, Philippe ^a   Bargiel, Sylwester ^a   Gorecki, Christophe ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL TECHNOLOGIES; FREE SPACE; MICRO ASSEMBLY; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICRO SYSTEMS TECHNOLOGIES; MICRO-OPTICAL BENCH; NEW CONCEPT; RE-CONFIGURABLE;

MICROMANIPULATORS; MICROSYSTEMS; MOEMS; THREE DIMENSIONAL;

MICROMACHINING;

EID: 77949356596     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAM.2009.5376922     Document Type: Conference Paper

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