Damage and microstructure evolution in GaN under Au ion irradiation

Journal of Physics D: Applied Physics

Volumn 43, Issue 8, 2010, Pages

  Zhang, Yanwen ^a   Ishimaru, Manabu ^b   Jagielski, Jacek ^c,d   Zhang, Weiming ^a,e   Zhu, Zihua ^a   Saraf, Laxmikant V ^a   Jiang, Weilin ^a   Thome, Lionel ^f   Weber, William J ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b OSAKA UNIVERSITY   (Japan)

^c ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^d SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^e PEKING UNIVERSITY   (China)

^f CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM NITRIDE; III-V SEMICONDUCTORS; ION BEAM LITHOGRAPHY; ION BEAMS; ION BOMBARDMENT; IONS; ITERATIVE METHODS; MICROSTRUCTURE; NITROGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

COMPLEMENTARY TECHNIQUES; ELECTRONIC STOPPING; EPITAXIALLY GROWN; GALLIUM NITRIDE (GAN); ION BEAM ANALYSIS TECHNIQUES; MICRO-STRUCTURE EVOLUTIONS; MONTE CARLO CODES; STOPPING AND RANGE OF IONS IN MATTERS;

GOLD;

EID: 77149163459     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/8/085303     Document Type: Article

References (35)

1. Kucheyev S O, Williams J S, Jagadish C, Zou J and Li G 2000 Phys. Rev. B 62 7510
2. Kucheyev S O, Williams J S, Jagadish C, Zou J, Craig V S J and Li G 2000 Appl. Phys. Lett. 77 1455
3. Jiang W, Weber W J and Thevuthasan S 2000 J. Appl. Phys. 87 7671
4. Pipeleers B, Hogg S M and Vantomme A 2005 J. Appl. Phys. 98 123504
5. Datta A, et al. 2005 Nanotechnology 16 2764
6. Wuu D S, Wang W K, Wen K S, Huang S C, Lin S H, Huang S Y, Lin C F and Horng R H 2006 Appl. Phys. Lett. 89 161105
7. Jiang W, Zhang Y, Weber W J, Lian J and Ewing R C 2006 Appl. Phys. Lett. 89 021903
8. Uedono A, Ito K, Nakamori H, Mori K, Nakano Y, Kachi T, Ishibashi S, Ohdaira T and Suzuki R 2007 J. Appl. Phys. 102 084505
9. Kucheyev S O, Bradby J E, Li C P, Ruffell S, Buuren T van and Felter T E 2007 Appl. Phys. Lett. 91 261905
10. Wu S-E, Liu C-P, Hsueh T-H, Chung H-C, Wang C-C and Wang C-Y 2007 Nanotechnology 18 445301
11. Lin C-H, Merz T A, Doutt D R, Hetzer M J, Joh J, Alamo J A del, Mishra U K and Brillson L J 2009 Appl. Phys. Lett. 95 033510
12. Ishimaru M, Zhang Y and Weber W J 2009 J. Appl. Phys. 106 053513
13. Gao Y, Xue J M, Zhang D Z, Wang Z L, Lan C, Yan S, Wang Y G, Xu F J, Shen B and Zhang Y 2009 J. Vac. Sci. Technol. B 27 2342
14. Lorenz K, Barradas P N, Alves E, Roqan I S, Nogales E, Martin R W, O'Donnell K P, Gloux F and Ruterana P 2009 J. Phys. D: Appl. Phys. 42 165103
15. Bae I-T, Jiang W, Wang C M, Weber W J and Zhang Y 2009 J. Appl. Phys. 105 083514
16. Ishimaru M, Hirata A, Naito M, Bae I-T, Zhang Y and Weber W J 2008 J. Appl. Phys. 104 033503
17. Wang C M, Zhang Y, Weber W J, Jiang W and Thomas L E 2003 J. Mater. Res. 18 772
18. Zhang Y, Bae I-T, Sun K, Wang C, Ishimaru M, Zhu Z, Jiang W and Weber W J 2009 J. Appl. Phys. 105 104901
19. Zhang Y, Weber W J, Shutthanandan V and Thevuthasan S 2006 Nucl. Instrum. Methods Phys. Res. B 251 127
20. Zhang Y, Zhu Z, Bennett W D, Saraf L V, Rausch J L, Hendricks C A, Weber W J, Lian J and Ewing R C 2009 J. Nucl. Mater. 389 303
21. Nowicki L, Turos A, Ratajczak R, Stonert A and Garrido F 2005 Nucl. Instrum. Methods Phys. Res. B 240 277
22. Moll S, Thomé L, Vincent L, Garrido F, Sattonnay G, Thomé T, Jagielski J and Costantini J-M 2009 J. Appl. Phys. 105 023512
23. Moll S, Thomé L, Sattonnay G, Debelle A, Garrido F, Vincent L and Jagielski J 2009 J. Appl. Phys. 106 073509
24. Jagielski J and Thomé L 2009 Appl. Phys. A 97 147
25. Ziegler J F, Biersack J P and Ziegler M D 2008 The Stopping and Range of Ions in Solids (Chester, MD: SRIM Co) (as well as the orginal book of Ziegler J F, Biersack J P and Littmark U 1985 (Oxford: Pergamon))
26. Ziegler J F 2008 SRIM-2008 v. 2008.40 http://www.srim.org
27. Gloux F, Wojtowicz T, Ruterana P, Lorenz K and Alves E 2006 J. Appl. Phys. 100 073520
28. Zhang Y, Whitlow H J, Winzell T, Bubb I F, Sajavaara T, Arstila K and Keinonen 1999 J. Nucl. Instrum. Methods Phys. Res. B 149 477
29. Nord J, Nordlund K and Keinonen J 2003 Phys. Rev. B 68 184104
30. Ionascut-Nedelcescu A, Carlone C, Houdayer A, Bardeleben H J von, Cantin J L and Raymond S 2002 IEEE Trans. Nucl. Sci. 49 2733
31. Look D C, Reynolds D C, Hemsky J W, Sizelove J R, Jones R L and Molnar R J 2004 Phys. Rev. Lett. 79 2273
32. Zinkle S J 1994 Nucl. Instrum. Methods Phys. Res. B 91 234
33. Sigmund P 2008 Eur. Phys. J. D 47 45
34. Zhang Y and Weber W J 2003 Phys. Rev. B 68 235317
35. Zhang Y 2002 Nucl. Instrum. Methods Phys. Res. B 196 1