Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry

International Journal of Precision Engineering and Manufacturing

Volumn 10, Issue 5, 2009, Pages 5-10

  Debnath, Sanjit Kumar ^a   You, Joonho ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Phase shifting interferometry; Reflectometry; Spectrally resolved white light interferometry; Thin film

Indexed keywords

EID: 77149158497     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0086-0     Document Type: Article

References (21)

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