Simultaneous stress and defect luminescence study on silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 2, 2010, Pages 436-441

  Gundel, Paul ^a   Schubert, Martin C ^a   Warta, Wilhelm ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAP ENERGY; DEFECT LUMINESCENCE; INTERNAL STRESS; MEASUREMENT TECHNIQUES; MICRO RAMAN SPECTROSCOPY; MINORITY CARRIER LIFETIMES; MULTICRYSTALLINE; STRESS-INDUCED;

CARRIER LIFETIME; DEFECTS; INSTRUMENTS; LUMINESCENCE; MECHANICAL STABILITY; PHOTOLUMINESCENCE SPECTROSCOPY; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; STRESS MEASUREMENT;

SILICON WAFERS;

EID: 76949095562     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200925368     Document Type: Article

References (19)

1. M. Becker, H. Scheel, S. Christiansen, and H. P. Strunk, J. Appl. Phys. 101, 063531 (2007).
2. W. Paul and D. M. Warschauer, J. Phys. Chem. Solids 5, 89 (1958).
3. W. Rindner, J. Appl. Phys. 33, 2479 (1962).
4. I. Goroff and L. Kleinman, Phys. Rev. 132, 1080-1084 (1963).
5. J. J. Wortman, J. R. Hauser, and R. M. Burger, J. Appl. Phys. 35(7), 2122 (1964).
6. I. Balslev, Phys. Rev. 143, 636 (1966).
7. L. D. Laude, F. H. Pollak, and M. Cardona, Phys. Rev. B 3, 2623 (1971).
8. K. Yasutake, M. Umeno, H. Kawabe, H. Nakayama, T. Nishino, and Y. Hamakawa, Jpn. J. Appl. Phys. 21(12), 1715 (1982).
9. Y. Ishibashi, T. Kobayashi, A. D. Prins, J. Nakahara, M. A. Lourenco, R. M. Gwilliam, and K. P. Homewood, Phys. Status Solidi B 244(1), 402 (2007).
10. S. Ostapenko, I. Tarasov, J. P. Kalejs, C. Haessler, and E.-U. Reisner, Semicond. Sci. Technol. 15, 840 (2000).
11. P. Würfel, J. Phys. C 15, 3967 (1982).
12. M. Suezawa and K. Sumino, Phys. Status Solidi A 78, 639 (1983).
13. P. Gundel, M. C. Schubert, W. Kwapil, J. Schön, M. Reiche, H. Savin, M. Yli-Koski, J. A. Sans, G. Martinez-Criado, W. Seifert, W. Warta, and E. R. Weber, Phys. Status Solidi RRL 3, 230 (2009).
14. I. De Wolf, Semicond. Sci. Technol. 11, 139 (1996).
15. A. A. Istratov, H. Hieslmair, and E. R. Weber, Appl. Phys. A: Mater. Sci. Process. A 70, 489 (2000).
16. M. Seibt, R. Khalil, V. Kveder, and W. Schröter, Appl. Phys. A 96, 235 (2009).
17. E. Ö. Sveinbjörnsson and J. Weber, Appl. Phys. Lett. 69, 2686 (1996).
18. V. Kveder, M. Badylevich, E. Steinman, A. Izotov, M. Seibt, and W. Schröter, Appl. Phys. Lett. 84, 2106 (2004).
19. R. Sauer, J. Weber, J. Stolz, E. R. Weber, K. H. Küsters, and H. Alexander, Appl. Phys. A 16(1), 1 (1985).