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Volumn 10, Issue 3, 2009, Pages 155-160

Manufacturing process of copper microgrooves utilizing a novel optical fiber-based laser-induced etching technique

Author keywords

Laser materials processing; Laser micromachining; Laser induced etching; Microgroove; Microstructure; Microthermal device

Indexed keywords


EID: 76849104471     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0061-9     Document Type: Article
Times cited : (6)

References (16)
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  • 2
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  • 3
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  • 5
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    • Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics
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    • Berre, M.L.1    Launay, S.2    Sartre, V.3    Lallemand, M.4
  • 10
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    • Thermochemical laser etching of stainless steel and titanium in liquids
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    • Nowak, R.1    Metev, S.2
  • 11
    • 33748795404 scopus 로고    scopus 로고
    • Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devices
    • Oh, K. H., Lee, M. K. and Jeong, S. H., "Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devices," Journal of Micromechanics and Microengineering, Vol. 16, No. 10, pp. 1958-1966, 2006
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , Issue.10 , pp. 1958-1966
    • Oh, K.H.1    Lee, M.K.2    Jeong, S.H.3
  • 12
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    • Oh, K. H., Lee, M. K. and Jeong, S. H., "Design and fabrication of a micro-heat pipe with high-aspect-ratio microchannels," Journal of the Korean Society for Precision Engineering, Vol. 23, No. 9, pp. 164-173, 2006
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    • Oh, K.H.1    Lee, M.K.2    Jeong, S.H.3
  • 13
  • 15
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    • Miracky, R.F.1    Doss, K.2
  • 16
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    • Role of bubbles in laser-assisted wet etching
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.