Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devices

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 1958-1966

  Oh, Kwang H ^a   Lee, M K ^a   Jeong, S H ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ETCHING; OPTIMIZATION; STAINLESS STEEL;

CROSS-SECTIONAL PROFILE; HIGH-ASPECT-RATIO (HAR); MICROTHERMAL DEVICES;

MICROMACHINING;

EID: 33748795404     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/007     Document Type: Article

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