Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics

Journal of Micromechanics and Microengineering

Volumn 13, Issue 3, 2003, Pages 436-441

  Le Berre, M ^a   Launay, S ^b   Sartre, V ^b   Lallemand, M ^b  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b UNIVERSITÉ DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COOLING; ETCHING; HEAT FLUX; HEAT TRANSFER; MATHEMATICAL MODELS; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TEMPERATURE; THERMAL CONDUCTIVITY;

MICRO HEAT PIPES; POLYSILICON HEATER;

HEAT PIPES;

EID: 0038015833     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/313     Document Type: Article

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