A review of crystallographic textures in chemical vapor-deposited diamond films

Signal, Image and Video Processing

Volumn 4, Issue 1, 2010, Pages 1-16

  Liu, Tao ^a   Raabe, Dierk ^a   Mao, Wei Min ^b  

^a MAX PLANCK INSTITUT FÜR EISENFORSCHUNG GMBH   (Germany)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

CVD diamond films; Deposition parameters; EBSD; Texture; Van der Drift growth selection mechanism

Indexed keywords

3D EBSD; CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS; CRYSTALLOGRAPHIC TEXTURES; CVD DIAMOND FILMS; DEPOSITION PARAMETERS; DIAMOND GRAINS; DIAMOND GROWTH; EBSD; ELECTRON BACKSCATTERING DIFFRACTION; EXPERIMENTAL OBSERVATION; FIBER TEXTURE; FILM MORPHOLOGY; FOCUSED ION BEAM TECHNIQUE; FRACTION VARIATION; GRAIN BOUNDARY CHARACTER; GRAIN ORIENTATION; GROWTH DIRECTIONS; GROWTH PARAMETERS; GROWTH SELECTION; HIGH ANGLE GRAIN BOUNDARIES; HIGH RESOLUTION; METHANE CONCENTRATIONS; MICROSCOPIC DEFECTS; NANOCRYSTALLINES; NITROGEN ADDITIONS; NUCLEATION ZONE; PHYSICAL AND MECHANICAL PROPERTIES; SERIAL SECTIONING; STEP SIZE; SUBSTRATE MATERIAL; SUBSTRATE TEMPERATURE; TEM; TEXTURE EVOLUTIONS; TEXTURE FORMATION;

CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMOND CUTTING TOOLS; DIAMONDS; ELECTRON DIFFRACTION; FILM GROWTH; FILM PREPARATION; FOCUSED ION BEAMS; FUNCTIONAL MATERIALS; GRAIN BOUNDARIES; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; METHANATION; METHANE; SINGLE CRYSTALS; SPECIMEN PREPARATION; TEXTURES; THICK FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DIAMOND FILMS;

CUTTING TOOLS; DEPOSITION; DIAMOND; ELECTRON DIFFRACTION; GROWTH; MECHANICAL PROPERTIES; SINGLE CRYSTALS; TEXTURE; THIN FILMS; X RAY DIFFRACTION;

EID: 76749160751     PISSN: 18631703     EISSN: 18631711     Source Type: Journal    
DOI: 10.1007/s11760-008-0099-7     Document Type: Review

References (41)

1. Prelas M A, Popovici G, Bigelow L K. Handbook of Industrial Diamonds and Diamond Films. New York: Marcel Dekker Press, 1998.
2. Clausing R E, Horton L L, Angus J C, et al. Diamond and Diamondlike Films and Coatings. New York: Plenum Press, 1991.
3. Govindaraju N, Aleksov A, Li X, et al. Comparative study of textured diamond films by thermal conductivity measurements. Applied Physics A: Material Science and Process, 2006, 85(3): 331-335.
4. McCurdy A K. Phonon conduction in elastically anisotropic cubic crystals. Physical Review B, 1982, 26(12): 6971-6986.
5. McCurdy A K, Maris H J, Elbaum C. Anisotropic heat conduction in cubic crystals in the boundary scattering regime. Physical Review B, 1970, 2(10): 4077-4083.
6. Su Q F, Xia Y B, Wang L J, et al. Influence of texture on optical and electrical properties of diamond films. Vacuum, 2007, 81(5): 644-648.
7. Banaszak A, Fabisiak K, Kaczmarski M, et al. Paramagnetic defects in diamond films synthesized by the hot filament chemical vapour deposition. Crystal Research and Technology, 2006, 41(6): 535-540.
8. Avigal Y, Glozman O, Etsion I, et al. [100]-Textured diamond films for tribological applications. Diamond and Related Materials, 1997, 6(2): 381-385.
9. Goudeau P, Vandenbulcke L, Met C, et al. X-ray diffraction analysis of residual stresses in smooth fined-grain diamond coatings deposited on TA6V alloys. Surface and Coatings Technology, 2005, 200(1-4): 170-173.
10. Schade A, Rosiwal S M, Singer R F. Tribological behaviour of 〈100〉 and 〈111〉 fibre textured CVD diamond films under dry planar sliding contact. Diamond and Related Materials, 2006, 15(10): 1682-1688.
11. Himpsel F J, Knapp J A, van Vechten J A, et al. Quantum photoyield of diamond(III) - A stable negative-affinity emitter. Physical Review B, 1979, 20(2): 624-627.
12. van der Drift A. Evolutionary selection: a principle governing growth orientation in vapour deposited layers. Philips Research Reports, 1967, 22: 267-288.
13. Wild Ch, Herres N, Koidl P. Texture formation in polycrystalline diamond films. Journal of Applied Physics, 1990, 68(3): 973-978.
14. Smereka P, Li X Q, Russo G, et al. Simulation of faceted film growth in three dimensions: microstructure, morphology and texture. Acta Materialia, 2005, 53(4): 1191-1204.
15. Mao W, Zhu H, Chen L, et al. Grain orientation dependence on distance to surface of CVD diamond film. Materials and Science Technology, 2005, 21(12): 1383-1386.
16. Delclos S, Dorignac D, Phillipp F, et al. UHREM investigation of stacking fault interactions in the CVD diamond structure. Diamond and Related Materials, 1999, 8(2-5): 682-687.
17. Yin L W, Li M S, Cui J J, et al. Planar defects and dislocations in HPHT as-grown diamond crystals. Diamond and Related Materials, 2002, 11(2): 268-272.
18. Liu T, Raabe D, Mao W, et al. Microtexture and grain boundaries in freestanding CVD diamond films: Growth and twinning mechanisms. Advanced Functional Materials, 2009, 19(24): 3880-3891.
19. Liu T, Raabe D, Zaefferer S. A 3D tomographic EBSD analysis of a CVD diamond thin film. Science and Technology of Advanced Materials, 2008, 9: 035013 (6 pages).
20. Liu T, Raabe D. Influence of nitrogen doping on growth rate and texture evolution of chemical vapor deposition diamond films. Applied Physics Letters, 2009, 94(2): 021119 (3 pages).
21. Chen H W, Rudolph V. The 3-D structure of polycrystalline diamond film by electron backscattering diffraction (EBSD). Diamond and Related Materials, 2003, 12(10-11): 1633-1639.
22. Wild C, Koildl P, Muller-Sebert W, et al. Chemical vapour deposition and characterization of smooth {100}-faceted diamond films. Diamond and Related Materials, 1993, 2(2-4): 158-168.
23. May P W. CVD diamond - a new technology for the future. Endeavour Magazine, 1995, 19(3): 101-106.
24. Busch J V, Dismukes J P. Trends and market perspectives for CVD diamond. Diamond and Related Materials, 1994, 3(4-6): 295-302.
25. Kobashi K. Diamond Films. Amsterdam: Elsevier, 2005.
26. Lu F X, Tang W Z, Huang T B, et al. Large area high quality diamond film deposition by high power DC arc plasma jet operating at gas recycling mode. Diamond Related Materials, 2001, 10(9-10): 1551-1558.
27. Zaefferer S, Wright S I, Raabe D. Three-dimensional orientation microscopy in a focused ion beam-scanning electron microscope: a new dimension of microstructure characterization. Metallurgical and Materials Transactions A, 2008, 39(2): 374-389.
28. Konrad J, Zaefferer S, Raabe D. Investigation of orientation gradients around a hard Laves particle in a warm-rolled Fe3Al-based alloy using a 3D EBSD-FIB technique. Acta Materialia, 2006, 54(5): 1369-1380.
29. Schmidt I, Benndorf C. Low temperature CVD diamond deposition using halogenated precursors - deposition on low melting materials: Al, Zn and glass. Diamond and Related Materials, 2001, 10(3-7): 347-351.
30. Kobashi K, Miyauchi S, Nishimura K, et al. Method for forming diamond films by vapor phase synthesis. US Patent, 5358754, 1994.
31. Zhu H X, Mao W M, Feng H P. Influence of methane concentration on crystal growing process in CVD free standing diamond films. Journal of Inorganic Materials, 2007, 22(3): 570-576 (in Chinese).
32. Williams B E, Kong H S, Glass J T. Electron microscopy of vapor phase deposited diamond. Journal of Materials Research, 1990, 5(4): 801-810.
33. Yan C S, Yogesh K, Vohra M N. Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond. Diamond and Related Materials, 1999, 8(11): 2022-2031.
34. Chu C J, Hauge R H, Margrave J L, et al. Mechanism of diamond growth by chemical vapor deposition on diamond (100), (111), and (110) surfaces: Carbon-13 studies. Applied Physics Letters, 1992, 61(12): 1393-1395.
35. Tang C J, Neves A J, Fernandes A H S. Influence of nucleation density on film quality, growth rate and morphology of thick CVD diamond films. Diamond and Related Materials, 2003, 12(9): 1488-1494.
36. Clausing R E, Heatherly L, Horton L L, et al. Textures and morphologies of chemical vapor deposited (CVD) diamond. Diamond and Related Materials, 1992, 1(5-6): 411-415.
37. Meakin D, Stoemenos J, Miglierate D, et al. Structural studies of low-temperature low-pressure chemical deposited polycrystalline silicon. Journal of Applied Physics, 1987, 61(11): 5031-5037.
38. Volmer M, Weber A. Nucleation of supersaturated structures. Zeitschrift für Physikalische Chemie, 1926, 119: 277-301 (in German).
39. Steeds JW, Gilmore A, Bussmann KM, et al. On the nature of grain boundary defects in high quality CVD diamond films and their influence on physical properties. Diamond and Related Materials, 1999, 8(6): 996-1005.
40. Wu G, Zaefferer S. Advances in TEM orientation microscopy by combination of dark-field conical scanning and improved image matching. Ultramicroscopy, 2009, 109(11): 1317-1325.
41. Raabe D. Cellular automata in materials science with particular reference to recrystallization simulation. Annual Review of Materials Research, 2002, 32: 53-76.