Tuning the thermal properties of hafnium precursors by tailoring the ligands

ECS Transactions

Volumn 25, Issue 8 PART 1, 2009, Pages 625-631

  Xu, K ^a   Milanov, A P ^a   Devi, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMIDINATES; DEPOSITION TEMPERATURES; EVAPORATION RATE; FIXED TEMPERATURE; GUANIDINATES; HAFNIUM COMPLEXES; HALF LIVES; LIGAND SYSTEM; NMR STUDIES; TEMPERATURE RANGE; THERMAL CHARACTERISTICS; THERMAL PROPERTIES; THERMAL STABILITY; TIME PERIODS;

AMIDES; CHEMICAL VAPOR DEPOSITION; HAFNIUM; LIGANDS; SYSTEM STABILITY; THERMAL EVAPORATION; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS; VAPORIZATION; VAPORS;

HAFNIUM COMPOUNDS;

EID: 76549122984     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3207649     Document Type: Conference Paper

References (12)

1. M. Sayer, K. Sreenivas, Science, 247, 1056 (1990).
2. K. Kukli, M. Ritala, T. Sajavaara, J. Keinonen, M. Leskela, Chem. Vap. Deposition, 8, 199 (2002).
3. M. A. Cameron, S. M. George, Thin Solid Films, 348, 90 (1999).
4. H. W. Kim, N. H. Kim, J. Alloys Compd., 389, 177 (2005).
5. G. A. Battiston, R. Gerbasi, M. Porchia, R. Bertoncello, F, Caccavale, Thin Solid Films, 279, 115(1996).
6. G X. Liu, F. K. Shan, J. J. Park, W. J. Lee, G H. Lee, I. S. Kim, B. C. Shin, S. G. Yoon, J. Electroceram., 17, 145 (2006).
7. M. Nieminen, L. Niinisto, E. Rauhala, J. Mater. Chem., 6, 27 (1996).
8. J. J. Gallegos III, T. L. Ward, T. J. Boyle, M. A. Rodriguez, L. P. Francisco, Chem. Vap.Deposition, 6, 21 (2000).
9. D. C. Bradley, I. M. Thomas, J. Chem. Soc., 3857 (1960).
10. R. C. Smith, T. Ma, N. Hoilien, L. Y. Tsung, M. J. Bevan, L. Colombo, J. Roberts, S. A. Campbell, W. L. Gladfelter, Adv. Mater. Opt. Electron, 10, 105 (2000).
11. A. Milanov, R. Bhakta, A. Baunemann, H. W. Becker, R. Thomas, P. Ehrhart, M. Winter A.Devi, Inorganic Chemistry 46, 11008 (2006).
12. A. Devi, R, Bhakta, A. P. Milanov, M. Hellwig, D. Barreca, E. Tondello, R. Thomas, P.Ehrhart, M.Winter, R.A.Fischer, Dalton Trans. 17, 1671 (2007).