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Surface and Coatings Technology

Volumn 204, Issue 14, 2010, Pages 2302-2306

Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser

(4) Kadokura, Hokuto a Ito, Akihiko a Kimura, Teiichi a Goto, Takashi a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Alumina; Coating; Laser CVD; Microstructure

Indexed keywords

ALUMINA COATING; CONTINUOUS WAVE; DEPOSITION TEMPERATURES; FACETED GRAINS; HIGH-SPEED; LASER CHEMICAL VAPOR DEPOSITION; LASER CVD; LASER POWER; MODERATE TEMPERATURE; ND : YAG LASERS; SINGLE PHASE; THERMAL CVD;

ALUMINUM; CHEMICAL VAPOR DEPOSITION; COATINGS; MICROSTRUCTURE; NEODYMIUM;

NEODYMIUM LASERS;

EID: 76349125307 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.12.029 Document Type: Article

Times cited : (26)

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