Sensitivity enhancement of piezoresistive micro acceleration sensors with nanometer stress concentration regions on sensing elements

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1333-1336

  Amarasinghe, R ^a   Dao, D V ^a   Dau, V T ^a   Tung, B T ^a   Sugiyama, S ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Accelerometer; Piezoresistive

Indexed keywords

ACCELERATION SENSORS; BULK- MICROMACHINING; FINITE ELEMENT SIMULATIONS; MICRO-CANTILEVERS; MICROCANTILEVER BEAMS; NEW DESIGN; PIEZO-RESISTIVE; PIEZO-RESISTORS; PIEZORESISTOR; RELATIVE RESISTANCE CHANGE; SENSING ELEMENTS; SENSITIVITY ENHANCEMENTS;

ACCELEROMETERS; ACTUATORS; ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SINGLE CRYSTALS; STRESS CONCENTRATION;

SOLID-STATE SENSORS;

EID: 71449126884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285847     Document Type: Conference Paper

References (5)

1. S. Kassegne, M.Madou, R.Whitten, J.Zoval, E.Mather, K. Sarkar "Design Issues in SOI-Based High-Sensitivity Piezoresistive Cantilever Devices," SPIE Conference on Smart Structures and Materials, San Diego, CA, March 17-21, 2002.
2. T.D.R. Baselt, G. U. Lee, K.M. Hansen, L.A. Chrisey, R.J. Colton, "A High-Sensitivity Micromachined Biosensor," Proceeding of IEEE, vol.58. no 4, pp 672-680, April 1997.
3. K.Samuel, M.Marc, W.Ralph, Z.Jim, M.Elizabeth, S.Kamal, "Design Issues in SOI-Based High-Sensitivity Piezoresistive Cantilever Devices,". The Proceedings of the SPIE Conference on Smart Structures and Materials, San Diego, CA., 2002.
4. M.A.Bhatti, L.C.Xi, L.Y.Zhong, and A.N.Abdalla, "Design and finite element analysis of piezoresistive cantilever with stress concentration holes" IEEE Cnference on Industrial Electronics and Applications, Harbin, Chaina, May 2007.
5. R.Amarasinghe, D.V.Dao, T.Toriyama, and S.Sugiyama, "Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements" Sensors and Actuators A:134 Physical, pp 310-320, 2007.