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Volumn 204, Issue 12-13, 2010, Pages 2019-2022
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Nano-crystalline Zr2ON2 thin films deposited by reactive magnetron sputtering
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Author keywords
Magnetron sputtering; Zirconium oxynitride
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Indexed keywords
CHEMICAL STRUCTURE;
CO-PRESENCE;
CUBIC PHASE;
DEPOSITION TEMPERATURES;
DISPERSION EQUATIONS;
EXTINCTION COEFFICIENT (K);
NANOCRYSTALLINES;
NITROGEN ATMOSPHERES;
OPTICAL ANALYSIS;
OXYNITRIDE FILMS;
OXYNITRIDES;
REACTIVE MAGNETRON SPUTTERING;
RF REACTIVE MAGNETRON SPUTTERING;
SECONDARY ION MASS SPECTROSCOPY;
SUBSTRATE TEMPERATURE;
TEM OBSERVATIONS;
XPS SPECTRA;
ATMOSPHERIC TEMPERATURE;
MAGNETRON SPUTTERING;
MAGNETRONS;
NITRIDES;
PHASE TRANSITIONS;
QUALITY CONTROL;
SECONDARY ION MASS SPECTROMETRY;
WATER VAPOR;
X RAY DIFFRACTION ANALYSIS;
ZIRCONIUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 76349114273
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.10.031 Document Type: Article |
Times cited : (16)
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References (19)
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