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Volumn 204, Issue 12-13, 2010, Pages 2019-2022

Nano-crystalline Zr2ON2 thin films deposited by reactive magnetron sputtering

Author keywords

Magnetron sputtering; Zirconium oxynitride

Indexed keywords

CHEMICAL STRUCTURE; CO-PRESENCE; CUBIC PHASE; DEPOSITION TEMPERATURES; DISPERSION EQUATIONS; EXTINCTION COEFFICIENT (K); NANOCRYSTALLINES; NITROGEN ATMOSPHERES; OPTICAL ANALYSIS; OXYNITRIDE FILMS; OXYNITRIDES; REACTIVE MAGNETRON SPUTTERING; RF REACTIVE MAGNETRON SPUTTERING; SECONDARY ION MASS SPECTROSCOPY; SUBSTRATE TEMPERATURE; TEM OBSERVATIONS; XPS SPECTRA;

EID: 76349114273     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.10.031     Document Type: Article
Times cited : (16)

References (19)
  • 11
    • 54249092908 scopus 로고
    • Cornell University Press, Ithaca, NY Chap. 3
    • Pauling L. The Nature of the Chemical Bond (1960), Cornell University Press, Ithaca, NY 144 Chap. 3
    • (1960) The Nature of the Chemical Bond , pp. 144
    • Pauling, L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.