Morphology of sputtered titanium nitride thin films on thermoplastic polymers

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1001-1005

  Riester, M ^a   Barwulf S ^b   Lugscheider, E ^b   Hilgers, H ^a  

^a IBM   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Magnetron sputter ion plating; Morphology; Polymer; Thin film; Titanium nitride

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; POLYAMIDES; POLYBUTENES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

MAGNETRON SPUTTERING ION PLATING (MSIP); POLYBUTYLENE TEREPHTHALATE;

TITANIUM NITRIDE;

EID: 0033333754     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00188-7     Document Type: Article

References (18)

1. Movchan B.A., Demchishin A.V. Phys. Met. Metallogr. 28:1969;83.
2. Thornton J.A. J. Vac. Sci. Technol. 11:1974;666.
3. Thornton J.A. Thin Solid Films. 40:1977;335.
4. Lardon M., Buhl R., Signer H., Pulker H.K., Moll E. Thin Solid Films. 54:1978;317.
5. Haefer R.A. Oberflächen- und Dünnschichttechnologie, Teil I: Beschichtung von Oberflächen. 1987;Springer, Berlin.
6. Lugscheider E., Barimani C., Wolff C., Guerreiro S., Doepper G. Surf. Coat. Technol. 86:(87):1996;177.
7. M. Riester, M.D. Lechner, H. Hilgers, Physical vapor deposited thin hard films on polymers: sample preparation for SEM analysis. J. Adhes. Sci. Technol., in press.
8. E. Lugscheider, S. Bärwulf, C. Barimani, M. Riester, H. Hilgers, Magnetron sputtered hard material coatings on thermoplastic polymers for clean room applications. Surf. Coat. Technol., in press.
9. M. Riester, S. Bärwulf, E. Lugscheider, M.D. Lechner, H. Hilgers, Morphology of titanium nitride coatings on thermoplastic polymers. J. Adhes. Sci. Technol., in press.
10. Riester M. Titaninitrid auf Thermoplasten. 1998;Shaker, Aachen.
11. Messier R., Giri A.P., Roy R.A. J. Vac. Sci. Technol. A. 2:1984;500.
12. da Silva Sobrinho A.S., Schüler N., Klemberg-Sapieha J.E., Wertheimer M.R., Andrews M., Gujrathi S.C. J. Vac. Sci. Technol. A. 16:(4):1998;2021.
13. Holländer A., Klemberg-Sapieha J.E., Wertheimer M.R. J. Polym. Sci., Part A: Polym. Chem. 34:1996;1511.
14. Fozza A., Roch J., Klemberg-Sapieha J.E., Kruse A., Holländer A., Wertheimer M.R. Nucl. Instrum. Methods Phys. Res. B. 131:1997;205.
15. M. Neuhäuser, M. Riester, S. Bärwulf, E. Lugscheider, H. Hilgers, Optical emission spectroscopy studies of titanium nitride sputtering on thermoplastic polymers. Presented at: PSE '98, Garmisch-Partenkirchen, Germany, 14-18 September 1998.
16. M. Neuhäuser, Optical emission spectroscopy of TiN deposition plasmas. Diploma thesis, University of Mainz, 1997.
17. M. Riester, S. Bärwulf, E. Lugscheider, H. Hilgers, Composition of the interface region of sputtered titanium nitride thin films on thermoplastic polymers. Presented at: PSE '98, Garmisch-Partenkirchen, Germany, 14-18 September 1998.
18. H. Hilgers, Metallisieren von Kunststoffen für die Entwicklung eines Reinraumbehälters. Final Report of the BMBF (German Federal Ministry for Education, Research and Technology) Project 13N6462, 1998.