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Surface and Coatings Technology

Volumn 200, Issue 9, 2006, Pages 2917-2922

Structural evolution in ZrNxOy thin films as a function of temperature

(9) Cunha, L a Vaz, F a Moura, C a Rebouta, L a Carvalho, P a Alves, E b Cavaleiro, A c Goudeau, Ph d Riviere J P d

a UNIVERSITY OF MINHO (Portugal)

b INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

c UNIVERSITY OF COIMBRA (Portugal)

d UNIVERSITÉ DE POITIERS (France)

Author keywords

Decorative coatings; Heat treatment; PVD coatings; Zirconium oxynitride

Indexed keywords

ANNEALING; COMPOSITION; HEAT TREATMENT; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; STEEL; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DECORATIVE COATINGS; PHYSICAL VAPOR DEPOSITION (PVD) COATINGS; RADIOFREQUENCY REACTIVE MAGNETRON SPUTTERING; ZIRCONIUM OXYNITRIDE;

ZIRCONIUM COMPOUNDS;

ANNEALING; COMPOSITION; HEAT TREATMENT; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; STEEL; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

EID: 31044441618 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.09.030 Document Type: Article

Times cited : (47)

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