A double pass surface encoder for measurement of planar motion

International Journal of Surface Science and Engineering

Volumn 1, Issue 1, 2007, Pages 80-99

  Watanabe, Yoji ^a   Gao, Wei ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

double pass; measurement; micro structured surface; position measurement; sensor; sinusoidal grid; surface encoder; surface stage

Indexed keywords

EID: 76349106012     PISSN: 1749785X     EISSN: 17497868     Source Type: Journal    
DOI: 10.1504/IJSURFSE.2007.013622     Document Type: Article

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