A six-degree-of-freedom precision motion stage

Review of Scientific Instruments

Volumn 73, Issue 6, 2002, Pages 2462-

  Seugling, Richard M ^a   Lebrun, Thomas ^b   Smith, Stuart T ^a   Howard, Lowell P ^c  

^a University of North Carolina at Charlotte   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c YAFO Networks Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036608486     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1476717     Document Type: Article

References (0)