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Volumn , Issue , 2009, Pages 1095-1098

A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance

Author keywords

[No Author keywords available]

Indexed keywords

BEARING FRICTION; ELECTROPNEUMATIC; ELECTROSTATIC MICROACTUATORS; MICRO BALL BEARINGS; NORMAL LOADS;

EID: 65949097734     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805578     Document Type: Conference Paper
Times cited : (6)

References (7)
  • 1
    • 33747250097 scopus 로고    scopus 로고
    • Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion
    • DOI 10.1088/0960-1317/16/9/S03, PII S096013170620250X, S03
    • A. Modafe, N. Ghalichechian, A. Frey, J. H. Lang, R. Ghodssi, "Microball-Bearing-Supported Electrostatic Micromachines with Polymer Dielectric Films for Electromechanical Power Conversion," Journal of Micromechanics and Microengineering (JMM), vol. 16, pp. S182-S190, September 2006. (Pubitemid 44235623)
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , Issue.9
    • Modafe, A.1    Ghalichechian, N.2    Frey, A.3    Lang, J.H.4    Ghodssi, R.5
  • 2
    • 34247593738 scopus 로고    scopus 로고
    • Dynamic characterization of a linear electrostatic micromotor supported on microball bearings
    • DOI 10.1016/j.sna.2006.08.019, PII S0924424706005498, Micromechanics Section of Sensors and Actuators
    • N. Ghalichechian, A. Modafe, J. H. Lang, R. Ghodssi, "Dynamic Characterization of a Linear Electrostatic Micromotor Supported on Microball Bearings," Sensors and Actuators: A. Physical, vol. 136 (2), pp. 416-503, May 2007. (Pubitemid 46678723)
    • (2007) Sensors and Actuators, A: Physical , vol.136 , Issue.2 , pp. 496-503
    • Ghalichechian, N.1    Modafe, A.2    Lang, J.H.3    Ghodssi, R.4
  • 3
    • 45449099948 scopus 로고    scopus 로고
    • "Design, fabrication, and characterization of a rotary micromotor supported on microball bearings,"
    • June
    • N. Ghalichechian, A. Modafe, M. Beyaz, R. Ghodssi, "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings," Journal of Microelectromechanical Systems (JMEMS), vol. 17, No. 3, pp. 632-642, June 2008.
    • (2008) Journal of Microelectromechanical Systems (JMEMS) , vol.17 , Issue.3 , pp. 632-642
    • Ghalichechian, N.1    Modafe, A.2    Beyaz, M.3    Ghodssi, R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.