Design, fabrication, and characterization of a microturbopump for a rankine cycle micro power generator

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 276-279

  Lee, Changgu ^a   Liamini, Mokhtar ^b   Fréchette, Luc G ^a,b  

^a Department of Mechanical Engineering ^*  (United States)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPRESSED AIR; DIGITAL STORAGE; FABRICATION; GAS LUBRICATED BEARINGS; GLASS; MICROSYSTEMS; PUMPS; REACTIVE ION ETCHING; ROTORS; SOLID-STATE SENSORS; STEAM POWER PLANTS; STEAM TURBINES; TURBINE COMPONENTS; WAFER BONDING;

ALIGNMENT STRUCTURE; DEEP REACTIVE ION ETCHING; LUBRICATION THEORY; MECHANICAL POWER; MICRO POWER GENERATOR; MICROPOWER GENERATION; PRESSURIZED WATER; STEAM TURBINE POWER PLANTS;

SILICON WAFERS;

EID: 84885251062     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. A. H. Epstein, “Millimeter-Scale, Micro-Electro-Mechanical Systems Gas Turbine Engines,” Journal of Engineering for Gas Turbines and Power, Vol. 126, pp205-226, April 2004.
2. L. G. Fréchette, C. Lee, S. Arslan, Y. C. Liu, “Design of a Microfabricated Rankine Cycle Steam Turbine for Power Generation,” Proc. ASME Int’l Mech. Eng. Congress and Expo. (IMECE’03), Washington, D.C., November 16-21, 2003.
3. C. Lee, and L. G. Fréchette, “Demonstration and characterization of a Multi-Stage Silicon Microturbine,” Proc. ASME Int’l Mech. Eng. Congress & Expo., Orlando, FL, November 5-11, 2005, Paper IMECE2005-81435
4. L. G. Fréchette,, S. A. Jacobson, K. S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, A.H. Epstein, "High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings," IEEE/ASME J. of MEMS, Vol. 14, No.1, 2005.
5. C. Lee, “Development of a microfabricated turbopump for a Rankine vapor power cycle,” Ph.D Thesis, Columbia University, February 2006.
6. N. Mueller, and L. G. Fréchette, “Performance Analysis of Brayton and Rankine Cycle Microsystems for Portable Power Generation,” Proc. ASME Int’l Mech. Eng. Congress & Expo., New Orleans, Louisiana, Nov. 17-22, 2002.
7. J. M. Protz, “An Assessement of the Aerodynamic, Thermodynamic, and Manufacturing Issues for the Design, Development, and Microfabrication of a Demonstration Micro Engine,” Ph.D Thesis, Massachusetts Institute of Technology, September 2000.