Miniature single-disk viscous pump (single-DVP), performance characterization

Journal of Fluids Engineering, Transactions of the ASME

Volumn 128, Issue 3, 2006, Pages 602-610

  Blanchard, Danny ^a   Ligrani, Phil ^a   Gale, Bruce ^a  

^a University of Utah   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; INTAKE SYSTEMS; MINIATURE INSTRUMENTS; PROTEINS; PUMPS; VISCOSITY;

DISK ROTATIONAL SPEED; FLUID INLET; PUMP CHAMBER; SINGLE-DISK VISCOUS PUMP (SINGLE-DVP);

VISCOUS FLOW;

EID: 33745140172     PISSN: 00982202     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2175167     Document Type: Article

References (38)

1. Nhuyen, N.-T., and Wereley, S. T., 2002, Fundamentals and Applications of Microfluidics, Artech House, Inc., Norwood, pp. 292-337.
2. Olsson, A., Steeme, G., and Steeme, E., 1995, "A Valve-less Planar Fluid Pump With Two Pump Chambers," Sens. Actuators, A, 47(2), pp. 549-556.
3. Tsia, J. H., and Lin, L., 2002, "A Thermal Bubble Actuated Micro Nozzle-Diffuser Pump," J. Microelectromech. Syst., 11(6), pp. 665-668.
4. Nguyen, N. T., and Huang, X. Y., 2001, "Miniature Valveless Pumps Based on Printed Circuit Board Technique," Sens. Actuators, A, 88(2), pp. 104-111.
5. Benard, W. L., Kahn, H., Heuer, A. H., and Huff, M. S., 1998, "Thin Film Shape-Memory Alloy Actuated Micropumps," J. Microelectromech. Syst., 7(2), pp. 245-251.
6. Meng, E., Wang, X.-Q., Jak, H., and Tai, Y.-C., 2000, "A Check-Valved Silicone Diaphragm Pump," Proceedings of MEMS '00, 13th International Workshop Micro ElectroMechanical Systems, Japan, Jan 23-27, pp. 23-27.
7. Gass, V., Van der School, G. H., Jeanneret, S., and DeRooij, N. F., 1994, "Integrated Flow-Regulated Silicon Micropump," Sens. Actuators, A. 43, pp. 335-338.
8. Saggere, L., Hagood, N. W., Roberts, D. C., Li, H. Q., Steyn, J. L., Turner, K., Carretero, J. A., Yaglioglu, O., Su, Y. H., Mlcak, R., Spearing, S. M., Breuer, K. S., and Schmidt, M. A., 2000, "Design, Fabrication, and Testing of a Piezoelectrically Driven High Flow Rate Micro-pump," Proceedings of the 12th IEEE International Symposium on Applications of Ferroelectrics, Vol. 1, July-Aug, pp. 297-300.
9. Richter, A., Plettner, A., Hofmann, K. A., and Sandmaier, H., 1991, "A Micromachined Electrohydrodynamic (EHD) Pump," Sens. Actuators, A, 29, pp. 159-168.
10. Fuhr, G., Hagedorn, R., Muller, T., Benecke, W., and Wagner, B., 1992, "Microfabricated Electrohydrodynamic (EHD) Pumps for Liquids of Higher Conductivity," J. Microelectromech. Syst., 1(3), pp. 141-146.
11. Ahn, S. H., and Kim, Y. K., 1998, "Fabrication and Experiment of a Planar Micro Ion Drag Pump," Sens. Actuators, A, 70. pp. 1-5.
12. Furuya, A., Shimokawa, F., Matsuura, T., and Sawada, R., 1996, "Fabrication of Fluorinated Polyimide Microgrids Using Magnetically Controlled Reactive Ion Etching (MCRIE) and Their Applications to a Ion Drag Integrated Micropump," J. Micromech. Microeng., 6, pp. 310-319.
13. Zeng, S., Chen, C. H., Mikkelsen, J. C., and Santiago, J. G., 2000, "Fabrication and Characterization of Electrokinetic Micro Pumps," 7th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems. CPMT/IEEE, Las Vegas, Vol. 2, pp. 31-36.
14. Kilani, M., Galambos, P., Haik, Y., and Chen, C. J., 2003, "Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump," J. Fluids Eng., 125(2), pp. 339-344.
15. Sen, M., Wajerski, D., and Gad-El-Hak, M., 1996, "A Novel Pump for MEMS Applications," J. Fluids Eng., 118(3), pp. 624-627.
16. Ahn, C. H., and Allen, M. G., 1995, "Fluid Micropumps Based on Rotary Magnetic Actuators," Proceedings of MEMS 1995, Jan.-Feb., pp. 408-418.
17. Dopper, J., Clemens, M., Ehrfeld, W., Jung. S., Kamper, K.-P., and Lehr, H., 1997, "Micro Gear Pumps for Dosing of Viscous Fluids," J. Micromech. Microeng., 7(2), pp. 230-232.
18. Mizoguchi, H., Ando, M., Mizuno, T., Takagi, T., and Nakajima, N., 1992, "Design and Fabrication of Light Driven Micropump," Proceedings of MEMS '92, 5th IEEE Int. Workshop MEMS, Germany, Jan. 25-28, pp. 31-36.
19. Grosjcan, C., and Tai, Y. C., 1999, "A Thermopneumatic Peristaltic Micropump," Proceedings of Transducer '99, the 10th Int. Conf. on Solid State Sensors and Actuators, Japan, June 7-10, pp. 1776-1779.
20. Cabuz, C., Herb, W. R., Cabuz, E. I., and Lu, S. T., 2001, "The Dual Diaphragm Pump," Proceedings of MEMS '01, 14th IEEE Int. Workshop MEMS, Switzerland, Jan. 21-25, pp. 519-522.
21. Luginbuhl, Ph., Collins, S. D., Racine, G. A., Gretillat, M. A., de Rooij, N. F., Brooks, K. G., and Setter, N., 1997, "Flexural-Plate-Wave Actuators Based on PZT Thin Films," Proceedings of MEMS '97, Jan, 1997, pp. 327-332.
22. Miyazaki, S., Kawai, T., and Araragi, M., 1991, "A Piezoelectric Pump Driven by a Flexural Progressive Wave," Proceedings of MEMS'91, 4th International Workshop MEMS, Japan, Jan. 30-Feb. 4, pp. 283-288.
23. Takagi, H., Maeda, R., Ozaki, K., Parameswaran, M., and Mehta, M., 1994, "Phase Transformation Type Micropump," Proceedings of International Symposium on Micro Machine and Human Sciences, Japan, Oct., pp. 199-202.
24. Geng, X., Yuan, H., Oguz, H. N., and Prosperetti, A., 2001, "Bubble-Based Micropump for Electrically Conducting Liquids," J. Micromech. Microeng., 11, pp. 270-276.
25. Hatch, A., Kamholz, A. E., Holman, G., Yager, P., and Bohringer, K. F., 2001, "A Ferrofluidic Magnetic Micropump," J. Microelectromech. Syst., 10(2), pp. 215-221.
26. Huang, L., Wang, W., Murphy, M. C., Lian, K., and Ling, Z. G., 2000, "LIGA Fabrication and Test of a DDC Type Magnetohydrodynamic (MHD) Micropump," Microsyst. Technol., 6, pp. 235-240.
27. Karniadakis, G. E., and Beskok, A., 2002, Micro Flows, Fundamentals and Simulation, Springer, New York, pp. 1-31.
28. Etsion, I., and Yaier, A., 1988, "Performance Analysis of a New Concept Viscous Pump," J. Tribol., 110, pp. 93-99.
29. Winoto, S. H., and Yohanand, K., 1994, "Analysis and Test of a Viscous Pump With Radial Pumping Grooves," Tribol. Trans., 37(4), pp. 691-700.
30. Arafa, H. A., and Osman, T. A., 2003, "Hydrostatic Bearings With Multiport Viscous Pumps," Proc. Inst. Mech. Eng., Part J: J. Eng. Tribol., 217, pp. 333-342.
31. Sato, Y., and Knight, J. D., 1992, "Performance Characteristics of Shrouded Rayleigh-step and Spiral Groove Viscous Pumps," J. Tribol., 114. pp. 499-506.
32. Elrod, H. G., 1973, "Some Refinements of the Theory of the Viscous Screw Pump," J. Lubr. Technol., 95(1), pp. 82-93.
33. Mainland, M., and Green, I., 1992, "Analysis and Optimization of Semicircular and Straight Lobe Viscous Pumps," J. Tribol., 114(3), pp. 515-523.
34. Hasinger, S. H., and Kehrt, L. G., 1963, "Investigation of a Shear-Force Pump," J. Eng. Power, 85, pp. 201-207.
35. Sharatchandra, M. C., Sen, M., and Gad-el-Hak, M., 1997, "Navier-Stokes Simulations of a Novel Viscous Pump," J. Fluids Eng., 119, pp. 372-382.
36. Blanchard, D., Ligrani, P., and Gale, B., 2004, "Rotary Centrifugal and Viscous Micropumps," US Patient Office, Application No. PCTUS2004028890, September 3.
37. Panton, R. L., 1996, Incompressible Flow, 2nd ed., New York, New York, pp. 148-154, 158-160, 660-664.
38. Moffat, R. J., 1982, "Contributions to the Theory of Single-Sample Uncertainty Analysis," J. Fluids Eng., 104, pp. 250-260.