Piezoresistive cantilever performance part I: Analytical model for sensitivity

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 137-148

  Park, Sung Jin ^a   Doll, Joseph C ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

Analytical model; Force sensor; Piezoresistance; Piezoresistive cantilever

Indexed keywords

ANALYTICAL MODEL; ANNEALING PROCESS; CONCENTRATION DEPENDENCE; DESIGN PARAMETERS; DESIGN PROCESS; DESIGN SPACES; DOPANT ATOMS; DOPANT PROFILE; EFFICIENCY FACTOR; FABRICATION PROCESS; FORCE SENSOR; GEOMETRY FACTORS; HIGH TEMPERATURE OXIDATION; LOOK UP TABLE; MEMBRANE PRESSURE; NONDIMENSIONAL; NONUNIFORM; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTANCE; PIEZORESISTIVE TRANSDUCERS; PIEZORESISTOR; PROCESS CONDITION; PROCESS FLOWS; PROCESS PARAMETERS; SENSITIVITY MODEL; SIMULATION RESULT;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DESIGN; ION BOMBARDMENT; ION IMPLANTATION; MODELS; SENSORS; TABLE LOOKUP; TRANSDUCERS;

NANOCANTILEVERS;

EID: 76349092890     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2036581     Document Type: Article

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