Design and optimization of an ultra-sensitive piezoresistive accelerometer for continuous respiratory sound monitoring

Sensor Letters

Volumn 5, Issue 2, 2007, Pages 450-458

  Wang, Zhuo ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

Novel piezoresistive accelerometer; Piezoresistive layer; Respiratory sound monitoring

Indexed keywords

ACCELEROMETERS; ACOUSTIC NOISE MEASUREMENT; COMPUTER SIMULATION; FINITE ELEMENT METHOD; RESPIRATORY SYSTEM; SIGNAL TO NOISE RATIO; STRAIN ENERGY;

PIEZORESISTIVE ACCELEROMETER; PIEZORESISTIVE LAYER; RESPIRATORY SOUND MONITORING;

BIOSENSORS;

EID: 34547196883     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2007.225     Document Type: Article

References (28)

1. N. Yazdi, F. Ayazi, and K. Najafi, Proc. IEEE 86, 1640 (1998).
2. L. M. Roylance and J. B. Angell, IEEE Trans. Electron Devices 26, 1911 (1979).
3. S. Huang, X. Li, Z. Song, Y. Wang, H. Yang, L. Che, and J. Jiao, J. Micromech. Microeng. 15, 993 (2005).
4. M. K. Lim, H. Du, C. Su, and W. L. Jin, Microelectron. Eng. 49, 263 (1999).
5. D. L. DeVoe and A. P. Pisano, Tech. Dig. 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97) 1205 (1997).
6. D. Uttamchandani, D. Liang, and B. Culshaw, Proc. SPIE Integrated Optics and Microstructures 27 (1992).
7. S. J. Sherman, W. K. Tsang, T. A. Core, R. S. Payne, D. E. Quinn, K. H. Chau, J. A. Farash, and S. K. Baum, Tech. Dig. IEEE Electron Devices Meeting (IEDM '92) 160 (1992).
8. H. K. Rockstad, T. W. Kenny, J. K. Reynolds, W. J. Kaiser, and T. B. Gabrielson, Sens. Actuators A 43, 107 (1994).
9. N. Gavriely and D. W. Cugell, in Breath Sounds Methodology, CRC Press, Boca Raton, Florida (1995), pp. 31-47.
10. H. Pasterkamp, S. S. Kraman, P. D. Defrain, and G. R. Wodicka, Chest 104, 1518 (1993).
11. H. Pasterkamp, S. S. Kraman, and G. R. Wodicka, Am. J. Respir. Crit. Care Med. 156, 974 (1997).
12. M. S. Winburg, J. Microelectromech. Syst. 8, 529 (1999).
13. M. H. Bao, Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes, Elsevier Science (2000).
14. J. J. Wortman and R. A. Evans, J. Appl. Phys. 36, 153 (1965).
15. L. Vannuccini, J. E. Earis, P. H. B. M. G. Cheetham, M. Rossi, A. R. A. Sovijvrai, and J. Vanderschoot, Eur. Respir. Rev. 10, 616 (2000).
16. F. N. Hooge, Phys. Lett. A 29, 139 (1969).
17. X. M. Yu, J. Thaysen, O. Hansen, and A. Boisen, J. Appl. Phys. 92, 6296 (2002).
18. W. F. Beadle, J. C. C. Tsai, and R. D. Plummer, Quick Reference Manual for Semiconductor Engineers, Wiley, New York (1985).
19. T. B. Gabrielson, IEEE Trans. Electron Devices 40, 903 (1993).
20. J. A. Harley and T. W. Kenny, J. Microelectromech. Syst. 9, 226 (2000).
21. Y. Kanda, IEEE Trans. Electron Devices 29, 64 (1982).
22. G. Masetti, M. Severi, and S. Solmi, IEEE Trans. Electron Devices 30, 764 (1983).
23. Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, J. Appl. Phys. 63, 1442 (1988).
24. M. Asheghi, K. Kurabayashi, R. Kasnavi, and K. E. Goodson, J. Appl. Phys. 91, 5079 (2002).
25. N. D. Arora, J. R. Hauser, and D. J. Roulston, IEEE Trans. Electron Dev. 29, 292 (1982).
26. F. J. Morin, T. H. Geballe, and C. Herring, Phys. Rev. 105, 525 (1957).
27. C. Bourgeois, E. Steinsland, N. Blanc, and N. F. de Rooij, Proc. 1997 IEEE Internat. Freq. Control Sym. 791 (1997).
28. S. P. Timoshenko and J. M. Gere, Theory of Elastic Stability McGraw-Hill, London (1961), 2nd edn.