Low temperature dependence three-axis accelerometer for high temperature environments with temperature control of SOI piezoresistors

Sensors and Actuators, A: Physical

Volumn 104, Issue 1, 2003, Pages 53-60

  Lee, Kyung Il ^a   Takao, Hidekuni ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Accelerometer; High temperature environment; Micro heaters; Micromachining; SOI; Temperature control; Three axis detection

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROMACHINING; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TEMPERATURE CONTROL;

PIEZORESISTORS;

SENSORS;

EID: 0037445347     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00483-1     Document Type: Article

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