Analytical model for comb-capacitance fringe fields

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 175-182

  Hammer, Hanno ^a  

^a SensorDynamics AG   (Austria)

Author keywords

Comb capacitance; Electric field; Fringe field; In plane interdigitated comb drive; Length of electric field lines; Levitation effect

Indexed keywords

COMB CAPACITANCE; COMB DRIVE; ELECTRIC FIELD LINES; FRINGE FIELDS; IN-PLANE; LEVITATION EFFECTS;

CAPACITANCE; COMPUTATIONAL GEOMETRY; ELECTRIC FIELD MEASUREMENT; ELECTRIC FIELDS; ELECTRIC POTENTIAL; GENE EXPRESSION; MEMS; MICROELECTROMECHANICAL DEVICES;

ELECTRIC NETWORK ANALYSIS;

EID: 76249122623     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2037833     Document Type: Article

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