Large linear micromirror array for UV femtosecond laser pulse shaping

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 39-40

  Waldis, Severin ^a   Webery, Stefan M ^b   Noell, Wilfried ^a   Extermanny, Jérôme ^b   Kiselevy, Denis ^b   Bonacinay, Luigi ^b   Wolfy, Jean Pierre ^b   De Rooij, Nico F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b UNIVERSITY OF GENEVA   (Switzerland)

Author keywords

Biomolecules; Micromirror; SOI; Timed DRIE; UV NIR femtosecond laser pulse shaping; Vertical comb drive

Indexed keywords

BIOMOLECULES; MICROMIRROR; SOI; TIMED DRIE; UV-NIR FEMTOSECOND LASER PULSE SHAPING; VERTICAL COMB DRIVE;

COMPOSITE MICROMECHANICS; DRIVES; ELECTRON BEAM LITHOGRAPHY; INFRARED DEVICES; LASER BEAMS; LASER FUSION; LASER PULSES; LASERS; MEMS; MICROELECTROMECHANICAL DEVICES; MODULATION; PHOTOLITHOGRAPHY; PHOTONICS; PULSE SHAPING CIRCUITS; ULTRASHORT PULSES;

PULSED LASER APPLICATIONS;

EID: 54049106996     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607817     Document Type: Conference Paper

References (6)

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