Design and analysis of planar and lattice electrostatic comb drive actuators

3rd International IEEE Northeast Workshop on Circuits and Systems Conference, NEWCAS 2005

Volumn 2005, Issue , 2005, Pages 151-154

  Kuendiger, Till ^a   Howard, G M ^a   Mokrian, Pedram ^a   Ahmadi, Majid ^a   Miller, W C ^a  

^a UNIVERSITY OF WINDSOR   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTROSTATICS; MACHINE DESIGN; MATHEMATICAL MODELS;

ELECTROSTATIC COMB DRIVE ACTUATORS; ELECTROSTATIC FORCES; LATTICE DESIGN; TORSIONAL FORCES;

ACTUATORS;

EID: 33745767312     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEWCAS.2005.1496723     Document Type: Conference Paper

References (5)

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2. J.L.A. Yeh, C.Y. Hui, N.C. Tien, "Electrostatic Model for an Asymmetric Comb Drive", Journal of Microelectromechanical Systems, vol. 9, no. 1, March 2000
3. W. Ye, S. Mukherjee, N.C. MacDonald, "Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems", Journal of Microelectromechanical Systems, vol. 7, no. 1, March 1998
4. J.D. Jackson, "Classical Electrodynamics, 3rd Edition", John Wiley and Sons, 1998.
5. W.C. Tang, M.G. Lim, R.T. Howe, "Electrostatic Comb Drive Levitation and Control Method", Journal of Microelectromechanical Systems, vol. 1, no. 4, December 1992.