Modeling a monolithic comb drive for large-deflection multi-DOF microtransduction

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2008, Pages 203-207

  Clark, J V ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Actuator; Comb drive; Microtransducer; Modeling; Monolithic comb drive; Nanoposltioner; Simulation

Indexed keywords

DEFLECTION (STRUCTURES); FINITE ELEMENT METHOD; MASKS; NONMETALS; OPTICAL DESIGN; SILICON;

ACTUATOR; COMB DRIVE; COMB DRIVES; DESIGN ISSUES; FINITE ELEMENT ANALYSIS; HIGH-PRECISION; IN-PLANE; IN-SITU; LARGE DEFLECTIONS; MASK FABRICATION; MATE RIAL PROPERTIES; MICROTRANSDUCER; MICROTRANSDUCERS; MODELING; MONOLITHIC COMB DRIVE; MULTIPLE DEGREES OF FREEDOM; NANO SCALING; NANOPOSLTIONER; OUT-OF PLANE; PREDICTED PERFORMANCE; PROOF MASS; SILICON-ON -INSULATOR; SIMULATION; STRUCTURAL LAYERS; THREE DIMENSIONS; VERTICAL COMB DRIVE; Z DIRECTIONS;

DRIVES;

EID: 51849086839     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/UGIM.2008.60     Document Type: Conference Paper

References (16)

1. S. Devasia, E. Eleftheriou, S. O. Reza, "A Survey of Control Issues in Nanopositioning," IEEE Transactions on Control Systems Technology, vol. 15, no. 5, September 2007, pp.802-823.
2. A. Ballato, "Piezoelectricity: History and new thrusts," in Proc. IEEE Ultrason. Symp., 1996, no. 1, pp. 575-583.
3. X. Tan and J. S. Baras, "Modeling and control of a magnetostrictive actuator," in Proc. 41st IEEE Conf. Dec. Control, 2002, pp. 866-872.
4. S. Verma, W. J. Kim. and J. Gu, "Six-axis nanopositioning device with precision magnetic levitation technology," IEEE-ASME Trans. Mechatron., [5] vol. 9, no. 2, pp. 384-391, Jun. 2004.
5. R. Horowitz et al., "Microactuators for dual-stage servo systems in magnetic disk files," in Springer Handbook of Nanotechnology, B. Bhushan, Ed. Berlin, Germany: Springer-Verlag. 2004, ch. 31, pp. 921-950.
6. S. Hoen, Q. Bai, J. A. Harley, D. A. Horsley, F. Matta, T. Verhoeven, J. Williams, and K. R. Williams, "A high-performance dipole surface drive for large travel and force," in Tech. Dig. (Transducers). 2003, pp. 344-347.
7. L. Abelmann, T. Bolhuis, A. M. Hoesum, G. J. M. Krijnen, and J. C. Lodder, "Large capacity probe recording using storage robots," Proc. IEE Sci. Meas. Technol., vol. 150, no. 5, pp. 218-221, Sep. 2003.
8. M. Despont. U. Drechsler. W. Haberle. M. A. Lantz, and H. E. Rothuizen, "A vibration resistant nanopositioner for mobile parallel-probe storage applications," J. Microelectromechan. Syst., vol 16, no. 1, pp. 130-139, Feb. 2007.
9. Y. B. Gianchandani and K. Najafi, "A silicon micromachined scanning thermal profiler with integrated elements for sensing and actuation," IEEE Trans. Electron Devices, vol. 44, no. 11, pp. 1857-1868, Nov. 1997.
10. T. Albrecht, M. Despont, E. Eleftheriou, J. U. Bu, and T. Hirano, "MEMS in mass storage systems," in Enabling Technologies for MEMS and Nanodevices, H. Baltes, O. Brand, G. K. Fedder. C. Hierold, J. G. Korvink, and O. Tabata, Eds. Weinheim, Germany: Wiley, 2004, vol. 1, pp. 193-236, ch.6.
11. NSF Wkshp on Control and System Integration Micro Nano Systems, 2004.www.isr.umd.edu/CMN-NSFwkshp/WkshpFullReport.pdf
12. J. Green, et al., "New iMEMS Angular-Rate-Sensing Gyroscope," Analog Dialogue, 37-03, 2003, pp.14.
13. T. Tran, D. Oliver, D. Thomson, and G. Bridges, "Sub-Zeptofarad Sensitivity Scannig Capacitance Microscopy," IEEE CCECE02 Proc; vol. 1, pp. 455459.
14. J. V. Clark, Electro Micro Metrology, Ph.D. Dissertation, UCBerkeley, 2005.
15. W. C. Tang, T.-C. Nguyen, and R. T. Howe, "Laterally Driven Polysilicon Resonant Microstructures," Tech. Dig.. IEEE Micro Electro Mech. Syst. Workshop, Salt Lake City, Utah, February 20-22, 1989, pp.53-59.
16. A. Selvakumar, K. Najafi, "Vertical Comb Array Microactualors," J. Microelectromechan. Syst.. vol. 12. no. 4, August 2003. pp.440-449.