Photonic bandgap analysis of photonic crystal slabs with elliptical holes and their formation with laser holography

Journal of Optics A: Pure and Applied Optics

Volumn 12, Issue 1, 2010, Pages

  Hung, Yung Jr ^a   Lee, San Liang ^a   Pan, Yen Ting ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Elliptical photonic crystal; Holography lithography; Photonic bandgap

Indexed keywords

AIR HOLES; CIRCULAR HOLES; ELLIPTICAL HOLES; ELLIPTICAL PHOTONIC CRYSTAL; FABRICATION ERRORS; FABRICATION PARAMETERS; FABRICATION PROCEDURE; FABRICATION TOLERANCES; HIGH ASPECT RATIO; HIGH REPRODUCIBILITY; LASER HOLOGRAPHY; MANUFACTURING YIELD; NEGATIVE PHOTORESISTS; PHOTONIC CRYSTAL SLAB; PROCESSING COSTS; SUBMICRON SCALE; PHOTONIC BANDGAP (PBG); PHOTONIC CRYSTAL (PHCS);

ASPECT RATIO; COST REDUCTION; ENERGY GAP; FABRICATION; HOLOGRAPHY; LASER RECORDING; PHOTONICS; SPONTANEOUS EMISSION; PHOTONIC BAND GAP; PHOTONIC CRYSTALS; PHOTORESISTS;

PHOTONIC CRYSTALS; LASER RECORDING;

EID: 75849149692     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/2040-8978/12/1/015102     Document Type: Article

References (22)

1. Johnson S G, Fan S, Villeneuve P R and Joannopoulos J D 1999 Guided modes in photonic crystal slabs Phys. Rev. 60 5751-8
2. McNab S J, Moll N and Vlasov Y A 2003 Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides Opt. Express 11 2927-39
3. Carlsson N, Ikeda N, Sugimoto Y, Asakawa K, Takemori T, Katayama Y, Kawai N and Inoue K 2002 Design, nanofabrication and analysis of near-infrared 2D photonic crystal air-bridge structures Opt. Quantum Electron. 34 123-31
4. Lai N-D, Liang W-P, Lin J-H, Hsu C-C and Lin C-H 2005 Fabrication of two-and three-dimensional periodic structures by multi-exposure of two-beam interference technique Opt. Express 13 9605-11
5. Pang L, Nakagawa W and Fainman Y 2003 Fabrication of two-dimensional photonic crystals with controlled defects by the use of multiple exposures and direct write Appl. Opt. 42 5450-6
6. Quinonez F, Menezes J W, Cescato L, Rodriguez-Esquerre V F, Hernandez-Figueroa H and Mansano R D 2006 Band gap of hexagonal 2D photonic crystals with elliptical holes recorded by interference lithography Opt. Express 14 4873-9
7. Vogelaar L, Nijdam W, van Wolferen H A G M, de Ridder R M, Segerink F B, Fluck E, Kuipers L and van Hulst N F 2001 Large area photonic crystal slabs for visible light with waveguiding defect structures: fabrication with focused ion beam assisted laser interference lithography Adv. Mater. 13 1551-4
8. Kondo T, Juodkazis S, Mizeikis V and Misawa H 2006 Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8 Opt. Express 14 7943-53 (Pubitemid 44277529)
9. Lai N-D, Liang W-P, Lin J-H and Hsu C-C 2005 Rapid fabrication of large-area periodic structures containing well-defined defects by combining holography and mask techniques Opt. Express 13 5331-7
10. Prodan L, Euser T G, van Wolferen H A G M, Bostan C, De Ridder R M, Beigang R, Boller K-J and Kuipers L 2004 Large-area two-dimensional silicon photonic crystals for infrared light fabricated with laser interference lithography Nanotechnology 15 639-42
11. Bain F M, Vasdekis A E and Turnbull G A 2005 Holographic recording of sub-micron period gratings and photonic crystals in the photoresist SU8 Proc. SPIE 5931 59311B
12. Cho C-O, Roh Y-G, Park Y, Jeon H, Lee B-S, Kim H-W and Choe Y-H 2004 Photonic crystal slab waveguides fabricated by the combination of holography and photolithography Japan. J. Appl. Phys. 43 1384-7
13. Liu T, Fallahi M, Moloney J V and Mansuripur M 2006 Fabrication of two-dimensional photonic crystals with embedded defects using blue-laser-writer and optical holography IEEE Photon. Technol. Lett. 18 1100-2
14. Kitson S C, Barnes W L and Sambles J R 1996 The fabrication of submicron hexagonal arrays using multiple-exposure optical interferometry IEEE Photon. Technol. Lett. 8 1662-4
15. Hung Y-J, Lee S-L, Pan Y-T and Chao C 2008 Holographic design and realization of hexagonal 2D photonic crystal with elliptical air holes Opto-Electron. Commun. Conf.
16. Alagappan G, Sun X W and Sun H D 2008 Symmetries of the eigenstates in an anisotropic photonic crystal Phys. Rev. B 77 195117
17. Labilloy D, Benisty H, Weisbuch C, Krauss T F, Cassagne D, Jouanin C, Houdre R, Oesterle U and Bardinal V 1999 Diffraction efficiency and guided light control by two-dimensional photonic-bandgap lattices IEEE J. Quantum Electron. 35 1045-52
18. Lee J-M, Oh S H, Lee C-W, Ko H, Park S, Kim K S and Park M-H 2005 Nanofabrication of InGaAsP periodic 2D columns with square and hexagonal lattices by reative ion etching Thin Solid Films 475 189-93
19. Zaidi S H and Brueck S R J 1988 High aspect-ratio holographic photoresist gratings Appl. Opt. 27 2999-3002
20. 2 single layer for reduction of the standing wave effects in the interference lithography of deep photoresist structures on Si J. Microelectron. 37 1265-70
21. Sawaki D and Amako J 2007 Deep-UV laser-based nano-patterning with holographic techniques Proc. SPIE 6459 64590F
22. Dammel R R and Norwood R A 1996 Modeling of bottom anti-reflection layers: sensitivity to optical constants Proc. SPIE 2724 754-69