Deep-UV laser-based nano-patterning with holographic techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6459, Issue , 2007, Pages

  Sawaki, Daisuke ^a   Amako, Jun ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

Deep UV laser; Holographic grating; Lithography; Subwavelength structure; Two beam interference

Indexed keywords

HOLOGRAPHIC GRATINGS; LIGHT INTERFERENCE; LITHOGRAPHY; OPTICAL DESIGN; ULTRAVIOLET RADIATION;

OPTICAL CONFIGURATIONS; SUBWAVELENGTH STRUCTURES; TWO-BEAM INTERFERENCE; TWO-BEAM INTERFERENCE LITHOGRAPHY;

OPTICAL DEVICES;

EID: 34248576133     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698483     Document Type: Conference Paper

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