Young's modulus measurement of thin-film materials using micro-cantilevers

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 1926-1934

  McShane, G J ^a   Boutchich, M ^a   Phani, A Srikantha ^a   Moore, D F ^a   Lu, T J ^a,b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COSTS; ELASTIC MODULI; FINITE ELEMENT METHOD; SCANNING; SILICON COMPOUNDS;

CANTILEVER DEFLECTION DATA; MICRO-CANTILEVER DEFLECTION; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); SILICON SUBSTRATE;

THIN FILMS;

EID: 33748802278     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/003     Document Type: Article

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