Conductivity in transparent anatase TiO2 films epitaxially grown by reactive sputtering deposition

Solid-State Electronics

Volumn 47, Issue 12, 2003, Pages 2275-2278

  Jeong, B S ^a   Norton, D P ^a   Budai, J D ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; SPUTTER DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

HALL MEASUREMENTS;

SEMICONDUCTING FILMS;

EID: 0142011540     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00210-7     Document Type: Article

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