Recursive parameter estimation for categorical process control

International Journal of Production Research

Volumn 48, Issue 5, 2010, Pages 1381-1394

  Wang, Kaibo ^a   Tsung, Fugee ^b  

^a TSINGHUA UNIVERSITY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Categorical observations; Statistical process adjustment; Statistical quality control

Indexed keywords

BAYESIAN FRAMEWORKS; PARAMETER ESTIMATE; PROCESS VARIABLES; QUALITY CHARACTERISTIC; REAL TIME; RECURSIVE PARAMETER ESTIMATION; SIMULATION RESULT; STATISTICAL PROCESS; STATISTICAL QUALITY CONTROL;

CUSTOMER SATISFACTION; METAL ANALYSIS; PARAMETER ESTIMATION; QUALITY ASSURANCE; QUALITY CONTROL; TOTAL QUALITY MANAGEMENT;

STATISTICAL PROCESS CONTROL;

EID: 74549217842     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540802570651     Document Type: Article

References (20)

1. Apley, D.W. and Kim, J., 2004. Cautious control of industrial process variability with uncertain input and disturbance model parameters. Technometrics, 46 (2), 188-199.
2. Butler, S.W. and Stefani, J.A., 1994. Supervisory run-to-run control of polysilicon gate etch using in-situ ellipsometry. IEEE Transactions on Semiconductor Manufacturing, 7 (2), 193-201.
3. Brondino, G., et al., 2006. Synthesis maps for multivariate ordinal variables in manufacturing. International Journal of Production Research, 44 (20), 4241-4255.
4. Chan, Y.C., Lee, Y.K., and Zohar, Y., 2006. High-throughput design and fabrication of an integrated microsystem with high aspect-ratio sub-micron pillar arrays for free-solution micro capillary electrophoresis. Journal of Micromechanics and Microengineering, 16 (4), 699-707.
5. Colosimo, B.M., Pan, R., and Del Castillo, E., 2005. Setup adjustment for discrete-part manufacturing processes with asymmetric cost functions. International Journal of Production Research, 43 (18), 3837-3854.
6. Colosimo, B.M. and Del Castillo, E., 2007. Bayesian process monitoring, control and optimization. Boca Raton, FL: Chapman and Hall/CRC.
7. Del Castillo, E. and Hurwitz, A.M., 1997. Run-to-run process control: literature review and extensions. Journal of Quality Technology, 29 (2), 184-196.
8. Del Castillo, E., 1999. Long run and transient analysis of a double EWMA feedback controller. IIE Transactions, 31 (12), 1157-1169.
9. Del Castillo, E., 2006. Statistical process adjustment: a brief retrospective, current status, and some opportunities for further work. Statistica Neerlandica, 60 (3), 309-326.
10. Fan, S.K.S., et al., 2002. SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes. International Journal of Production Research, 40 (13), 3093-3120.
11. Fasulo, P.D., et al., 2004. Extrusion processing of TPO nanocomposites. Polymer Engineering and Science, 44 (6), 1036-1045.
12. Geman, S. and Geman, D., 1984. Stochastic relaxation, Gibbs distributions, and the Bayesian restoration of images. IEEE Transactions on Pattern Analysis and Machine Intelligence, 6 (6), 721-741.
13. Ingolfsson, A. and Sachs, E., 1993. Stability and sensitivity of an EWMA controller. Journal of Quality Technology, 25 (4), 271-287.
14. Jen, C.H., Jiang, B.C., and Fan, S.K.S., 2004. General run-to-run (R2R) control framework using self-tuning control for multiple-input multiple-output (MIMO) processes. International Journal of Production Research, 42 (20), 4249-4270.
15. Laviolette, M., et al., 1995. A probabilistic and statistical view of fuzzy methods. Technometrics, 37 (3), 249-261.
16. Spanos, C.J. and Chen, R.L., 1997. Using qualitative observations for process tuning and control. IEEE Transactions on Semiconductor Manufacturing, 10 (2), 307-316.
17. STS, 2006. STS in Nanotechnology. STS Innovations.
18. Tseng, S.T., et al., 2003. A study of variable EWMA controller. IEEE Transactions on Semiconductor Manufacturing, 16 (4), 633-643.
19. Wang, K. and Tsung, F., 2007. Run-to-run process adjustment using categorical observations. Journal of Quality Technology, 39 (4), 312-325.
20. Yu, F.J., Low, C.Y., and Cheng, S.S., 2003. Design for an SPRT control scheme based on linguistic data. International Journal of Production Research, 41 (6), 1299-1309.