High-throughput design and fabrication of an integrated microsystem with high aspect-ratio sub-micron pillar arrays for free-solution micro capillary electrophoresis

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 699-707

  Chan, Yick Chuen ^a   Lee, Yi Kuen ^a   Zohar, Yitshak ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPILLARITY; DNA; ELECTRON BEAM LITHOGRAPHY; ETCHING; MICROSCOPIC EXAMINATION; PHOTOLITHOGRAPHY; SILICON; SUBSTRATES;

ELECTROPHORESIS MICROSYSTEM; FLUORESCENCE VIDEO MICROSCOPY; PROJECTION;

ELECTROPHORESIS;

EID: 33645085037     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/005     Document Type: Article

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