A study of variable EWMA controller

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 4, 2003, Pages 633-643

  Tseng, Sheng Tsaing ^a   Yeh, Arthur B ^b   Tsung, Fugee ^c   Chan, Yun Yu ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b BOWLING GREEN STATE UNIVERSITY   (United States)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Run by run process control; Single EWMA controller; Variable discount factor

Indexed keywords

APPROXIMATION THEORY; HEURISTIC METHODS; OPTIMAL CONTROL SYSTEMS; STATISTICAL PROCESS CONTROL; SYSTEM STABILITY;

EXPONENTIALLY WEIGHTED MOVING AVERAGE; OPTIMAL VARIABLE DISCOUNT FACTOR; RUN BY RUN PROCESS CONTROL;

FEEDBACK CONTROL;

EID: 0344033901     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.818960     Document Type: Article

References (13)

1. G. E. P. Box, G. M. Jenkins, and G. C. Reinsel, Time Series Analysis: Forecasting and Control, 3rd ed. Englewood Cliffs, NJ: Prentice Hall, 1994.
2. G. Box, and A. Luceño, Statistical Control by Monitoring and Feedback Adjustment. New York: Wiley, 1997.
3. S. W. Butler and J. A. Stefani, "Supervisory run-to-run control of a polysilicon gate etch using in situ ellipsometry," IEEE Trans. Semiconduct. Manuf., vol. 7, pp. 193-201, 1994.
4. E. Del Castillo, "Long run and transient analysis of a double EWMA feedback controller," IIE Trans., vol. 31, pp. 1157-11 169, 1999.
5. E. Del Castillo and A. Hurwitz, "Run to run process control: A literature review and some extensions," J. Quality Technol., vol. 29, pp. 184-196, 1997.
6. A. Ingolfsson and E. Sachs, "Stability and sensitivity of an EWMA controller," J. Quality Technol., vol. 25, pp. 271-287, 1993.
7. D. C. Montgomery, J. B. Keats, G. C. Runger, G. C. Runger, and W. S. Messina, "Integrating statistical process control and engineering process control," J. Quality Technol., vol. 26, pp. 79-87, 1994.
8. N. S. Patel and S. T. Jenkins, "Adaptive optimization of run-to-run controllers: The EWMA example," IEEE Trans. Semiconduct. Manuf., vol. 13, pp. 97-107, 2000.
9. S. T. Tseng, R. J. Chou, and S. P. Lee, "Statistical design of a double EWMA controller," Appl. Stochastic Models Business Indust., vol. 18, no. 3, pp. 313-322, 2002a.
10. ____, "A study of multivariate EWMA controller," IIE Trans., vol. 34, no. 6, pp. 541-549, 2002b.
11. F. Tsung, H. Wu, and V. N. Nair, "On the efficiency and robustness of discrete proportional-integral control schemes," Technometrics, vol. 40, pp. 214-222, 1998.
12. F. Tsung and J. Shi, "Integrated design of run-to-run PID controller and SPC monitoring for process disturbance rejection," IIE Trans., vol. 31, pp. 517-527, 1999.
13. F. Tsung, J. Shi, and C. F. J. Wu, "Joint monitoring of PID-controlled processes," J. Quality Technol., vol. 31, pp. 275-285, 1999.