SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes

International Journal of Production Research

Volumn 40, Issue 13, 2002, Pages 3093-3120

  Fan, Shu Kai Simon ^a   Jiang, Bernard C ^a   Jen, Chih Hung ^a   Wang, Chien Chih ^b  

^a YUAN ZE UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; MICROELECTRONIC PROCESSING; SELF TUNING CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL PROCESS CONTROL;

RUN-TO-RUN (R2R) CONTROL SCHEMES; SINGLE-INPUT SINGLE-OUTPUT (SISO) SYSTEMS;

PRODUCTION CONTROL;

EID: 0037056111     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/00207540210141652     Document Type: Article

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