Using qualitative observations for process tuning and control

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 2, 1997, Pages 307-316

  Spanos, Costas J ^a,b   Chen, Raymond L ^c  

^a IEEE   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Ocwen Financial Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED MANUFACTURING; INTELLIGENT CONTROL; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE MODELS; STATISTICAL PROCESS CONTROL;

PROCESS TUNING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031143331     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.572086     Document Type: Article

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