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Volumn 36, Issue 12, 2009, Pages 3093-3115

Diffractive multi-beam ultra-fast laser micro-processing using a spatial light modulator

Author keywords

Computer generated holograms (CGH); Femto second laser; Spatial light modulator (SLM)

Indexed keywords

BEAMLETS; COMPUTER GENERATED HOLOGRAMS; DEFOCUS; FEMTO-SECOND LASER; FOURIER PLANES; FRESNEL ZONES; HIGH PRECISION; HIGH THROUGHPUT; HIGHER EFFICIENCY; MICRO PROCESSING; MULTI-BEAM; PARALLEL PROCESSING; SPATIAL LIGHT MODULATION; SPATIAL LIGHT MODULATORS; SPEED DYNAMICS; SURFACE ABLATION; THREE-DIMENSIONAL (3D); TRANSPARENT MATERIAL; ULTRAFAST LASER; ZERO ORDER;

EID: 74349088175     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: 10.3788/CJL20093612.3093     Document Type: Article
Times cited : (9)

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