Hysteresis behaviour of reactive high power impulse magnetron sputtering

Thin Solid Films

Volumn 518, Issue 8, 2010, Pages 1962-1965

  Audronis, M ^a   Bellido Gonzalez, V ^a  

^a Gencoa Ltd   (United Kingdom)

Author keywords

High Power Impulse Magnetron Sputtering; Plasma optical emission monitoring; Process control; Reactive sputtering

Indexed keywords

AVERAGE POWER; DIRECT CURRENT MAGNETRON SPUTTERING; DUTY CYCLES; HIGH POWER IMPULSE MAGNETRON SPUTTERING; HYSTERESIS BEHAVIOUR; HYSTERESIS CURVE; HYSTERESIS EFFECT; MONITORING AND CONTROL; OXIDATION MECHANISMS; PLASMA EMISSION MONITORING; PULSE VOLTAGE;

HYSTERESIS; ION IMPLANTATION; LIGHT EMISSION; MAGNETRON SPUTTERING;

PROCESS CONTROL;

EID: 74249115818     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.12.011     Document Type: Letter

References (17)

1. Konstantinidis S., Dauchot J.P., and Hecq M. Thin Solid Films 515 (2006) 1182
2. Sarakinos K., Alami J., and Wuttig M. J. Phys. D. Appl. Phys. 40 (2007) 2108
3. Wallin E., Selinder T.I., Elfwing M., and Helmersson U. Europhys. Lett. 82 (2008) 36002
4. Ruske F., Pflug A., Sittinger V., Werner W., Szyszka B., and Christie D.J. Thin Solid Films 516 (2008) 4472
5. Davis J.A., Sproul W.D., Christie D.J., and Geisler M. Proceedings, 47th Annual Technical Conference (2004), Society of Vacuum Coaters, Dallas, TX, USA 215
6. Sproul W.D., Christie D.J., and Carter D.C. Proceedings, 47th Annual Technical Conference (2004), Society of Vacuum Coaters, Dallas, TX, USA 96
7. Sproul W.D., Christie D.J., and Carter D.C. Thin Solid Films 491 (2005) 1
8. J. Weichart, S. Kadlec, M. Elghazzali, U.S. Patent application No. 2009173622 (A1), 9 Jul. 2009.
9. Wallin E., and Helmersson U. Thin Solid Films 516 (2008) 6398
10. Benzeggouta D., Hugon M.C., and Bretagne J. Plasma Sources Sci. Technol. 18 (2009) 045026
11. Depla D., Colpaert A., Eufinger K., Segers A., Haemers J., and De Gryse R. Vacuum 66 (2002) 9
12. Depla D., Heirwegh S., Mahieu S., and De Gryse R. J. Phys. D, Appl. Phys. 40 (2007) 1957
13. Depla D., Mahieu S., and De Gryse R. Thin Solid Films 517 (2009) 2825
14. Abe Y., Takisawa T., Kawamura M., and Sasaki K. Jpn. J. Appl. Phys. Part 1 46 (2007) 6778
15. Guttler D., Abendroth B., Grotzschel R., Moller W., and Depla D. Appl. Phys. Lett. 85 (2004) 6134
16. M. Audronis, V. Bellido-Gonzalez, B. Daniel, Surf. Coat. Technol. in press (http://dx.doi.org/10.1016/j.surfcoat.2009.11.040).
17. M. Audronis, V. Bellido-Gonzalez, B. Daniel, (UK patent application) GB0916417.9, 21 Sep. 2009.