Enhanced performance of an EUV light source (λ = 84 nm) using short-pulse excitation of a windowless dielectric barrier discharge in neon

Journal of Physics D: Applied Physics

Volumn 43, Issue 2, 2010, Pages

  Carman, R J ^a   Kane, D M ^a   Ward, B K ^a  

^a MACQUARIE UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC BARRIER DISCHARGES; ENHANCED PERFORMANCE; EUV LIGHT SOURCES; EXCIMER LAMPS; EXTREME ULTRAVIOLETS; GAS PRESSURES; OPERATING CONDITION; OPTICAL CHARACTERISTICS; OUTPUT ENERGY; PEAK POWER; PRESSURE RANGES; PULSE SHAPES; PULSED OPERATION; PULSED VOLTAGES; RISETIMES; SHORT-PULSE; SINUSOIDAL VOLTAGE; SINUSOIDAL WAVEFORMS; SPECTRAL EMISSION; SPECTRAL PURITY; SPECTRAL RANGE; TEMPORAL EVOLUTION; WAVE FORMS; WAVELENGTH RANGES;

CONVERSION EFFICIENCY; DIELECTRIC DEVICES; FLOW CONTROL; LIGHT; LIGHT SOURCES; NEON; PLASMAS;

ULTRAVIOLET DEVICES;

EID: 73649123219     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/2/025205     Document Type: Article

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