Applications of a broadband electron-beam pumped XUV radiation source

Journal of Physics D: Applied Physics

Volumn 37, Issue 11, 2004, Pages 1586-1591

  Fedenev, A ^a   Morozov, A ^b   Krucken R ^b   Schoop, S ^b   Wieser, J ^c   Ulrich, A ^b  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^c TUI   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; ERROR ANALYSIS; EXCIMER LASERS; INERT GASES; LASER PRODUCED PLASMAS; PHOTOIONIZATION; PHOTONS; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTROSCOPY;

CAPILLARY DISCHARGES; EMISSION SPECTRUM; EXCIMER EMISSIONS; EXTREME ULTRAVIOLET (XUV) RADIATION;

ELECTRON BEAMS;

EID: 2942585021     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/11/013     Document Type: Article

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