Vacuum ultraviolet rare gas excimer light source

Review of Scientific Instruments

Volumn 68, Issue 3, 1997, Pages 1360-1364

  Wieser, J ^a   Murnick, D E ^a   Ulrich, A ^b   Huggins, H A ^c   Liddle, A ^c   Brown, W L ^c  

^a RUTGERS UNIVERSITY   (United States)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000768592     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147942     Document Type: Article

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