Robustness of RF MEMS capacitive switches with molybdenum membranes

IEEE Transactions on Microwave Theory and Techniques

Volumn 57, Issue 12, 2009, Pages 3262-3269

  Palego, Cristiano ^a   Deng, Jie ^a   Peng, Zhen ^a   Halder, Subrata ^a   Hwang, James C M ^a   Forehand, David I ^b   Scarbrough, Derek ^b   Goldsmith, Charles L ^b   Johnston, Ian ^c   Sampath, Suresh K ^c   Datta, Arindom ^c  

^a Lehigh University   (United States)

^b MEMtronics Inc   (United States)

^c Innovative Micro Technology   (United States)

Author keywords

Heating; Microelectromechanical devices; Microwave switches; Molybdenum; Temperature; Thermal factors

Indexed keywords

ALUMINUM MEMBRANES; AMBIENT TEMPERATURE CHANGE; CAPACITIVE SWITCH; CONTINUOUS WAVE; HANDLING CAPACITY; LARGE-SIGNALS; MEMBRANE MATERIAL; MICROWAVE SWITCH; MICROWAVE SWITCHES; NONUNIFORM CURRENT; PULL-IN VOLTAGE; PULSE CONDITION; REDUCED SENSITIVITY; RF MEMS CAPACITIVE SWITCHES; RF MICROELECTROMECHANICAL SYSTEMS; RF PERFORMANCE; RF SIGNAL; SELF BIASING; SELF-HEATING EFFECT; THERMAL FACTORS;

ALUMINUM; COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; HEATING; MATERIALS HANDLING; MEMBRANES; MEMS; MICROWAVES; MOLYBDENUM;

MICROELECTROMECHANICAL DEVICES;

EID: 73049112335     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2009.2033885     Document Type: Article

References (16)

1. C. L. Goldsmith, J. Maciel, and J. McKillop, "Demonstrating reliability," IEEE Microw. Mag., vol. 8, pp. 56-60, Dec. 2007.
2. B. Schawwecker, J. Mehner, K. Strohm, H. Haspeklo, and J.-F. Lu, "Investigations of RF shunt airbridges among different environmental conditions," Sens. Actuators A, vol. 114, pp. 49-58, May 2004.
3. C. L. Goldsmith and D. I. Forehand, "Temperature variation of actuation voltage in capacitive MEMS switches," IEEE Microw. Wireless Components Lett., vol. 15, no. 10, pp. 718-720, Oct. 2005.
4. H. Nieminem, V. Ermolov, S. Silanto, K. Nybergh, and T. Ryhanen, "Design of a temperature stable RF MEM capacitor," J. Microelectromech. Syst., vol. 13, pp. 705-714, Oct. 2004.
5. I. Reines, B. Pillans, and G. M. Rebeiz, "A stress-tolerant temperature-stable RF-MEMS switched capacitor," in Proc. IEEE Int. Conf. Microelectromech. Syst., Jan. 2009, pp. 880-883.
6. D. S. Gardner and P. A. Flinn, "Mechanical stress as a function of temperature in aluminum films," IEEE Trans. Electron Devices, vol. 35, no. 12, pp. 2160-2169, Dec. 1988.
7. R. B. Brown, M. L. Ger, and T. Nguyen, "Characterization of molybdenum thin films for micromechanical structures," in Proc. IEEE Int. Conf. Microelectromechanical Syst., Feb. 1990, pp. 77-81.
8. C. Goldsmith, D. Forehand, D. Scarbrough, I. Johnston, S. Sampath, A. Datta, Z. Peng, C. Palego, and J. C. M. Hwang, "Performance of molybdenum as a mechanical membrane for RF MEMS switches," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2009, pp. 1229-1232.
9. B. Pillans, J. Kleber, C. Goldsmith, and M. Eberly, "RF power handling of capacitive RF MEMS devices," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2002, pp. 329-332.
10. P. M. Osterberg and S. D. Senturia, "M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures," J. Microelectromech. Syst., vol. 6, pp. 107-118, Jun. 1997.
11. G. M. Rebeiz, RF MEMS Theory, Design Technology. Hoboken, NJ: Wiley, 2003.
12. J. B. Rizk, E. Chaiban, and G. M. Rebeiz, "Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2002, pp. 239-242.
13. J. R. Reid, L. A. Starman, and R. T. Webster, "RF actuation of capacitive MEMS switches," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2003, pp. 1919-1922.
14. C. L. Goldsmith, D. I. Forehand, Z. Peng, J. C. M. Hwang, and J. L. Ebel, "High-cycle life testing of RF MEMS switches," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2007, pp. 1805-1808.
15. Z. J. Yao, S. Chen, S. Eschelman, D. Denniston, and C. Goldsmith, "Micromachined low-loss microwave switches," J. Microelectromech. Syst., vol. 8, pp. 129-134, Jun. 1999.
16. C. L. Goldsmith, D. I. Forehand, X.-B.Yuan, and J. C. M. Hwang, "Tailoring capacitive switch technology for reliable operation," presented at the Government Microcircuits Appl. Critical Technol. Conf. Dig., Mar. 2006, paper 2.01.