A stress-tolerant temperature-stable RF MEMS switched capacitor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 880-883

  Reines, I ^a   Pillans, B ^b   Rebeiz, G M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAXIAL STRESS; DEVICE SENSITIVITY; PERFORMANCE UNIFORMITY; PULL-IN VOLTAGE; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; REDUCED SENSITIVITY; RF-MEMS; SUSPENDED BEAMS; SWITCHED CAPACITOR; SYMMETRIC GEOMETRY; TEMPERATURE STABLE; WAFER-SCALE;

CAPACITANCE; CAPACITORS; MEMS; RESIDUAL STRESSES; STRENGTH OF MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 65949109717     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805524     Document Type: Conference Paper

References (8)

1. G. M. Rebeiz, RF MEMS Theory, Design, and Technology. John Wiley, 2003
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3. S. Park et al. "Low-Loss 4-6 GHz Tunable Filter With 3-Bit High-Q Orthogonal Bias RF-MEMS Capacitance Network", IEEE Trans. on Microwave. Theory and Tech., vol. 56, no. 10, pp. 2348-2355,October, 2008.
4. C. Goldsmith et al. "Temperature Variation of Actuation Voltage in Capacitive MEMS Switches", IEEE Microwave. and Wireless Component Lett., vol. 15, no. 10, pp. 718-720, October, 2005.
5. B. Pillans, "RF MEMS reliability at Raytheon", in Proc. IEEE MTT-S Workshop WFF. Reliability Testing & Reliability Enhancement in RF MEMS Switches, June, 2004.
6. J. Reid et al. "RF Actuation of Capacitive MEMS Switches", IEEE MTT-S, pp. 1919-1922, June 2003.
7. H. Nieminen et al. "Design of a Temperature-Stable RF MEM Capacitor", J. MEMS, vol.13, no.5, pp. 705-714, October, 2004.
8. CoventorWaret, http:// www.coventor.com